Results 201 to 210 of about 4,206 (226)

Fabrication of sharp knife-edged micro probe card combined with shadow mask deposition

Sensors and Actuators A: Physical, 2004
Abstract We introduce a micro-machined cantilever type probe card with a special tip shape made of single crystal silicon. A novel process for the micro-machined probe card with a sharp tip formation was developed and micro probe arrays of 40 μm in pitch were also realized.
Younghak Cho, Tony Kuki, Yamato Fukuta, Hiroyuki Fujita, Beomjoon Kim   +4 more
openaire   +1 more source

Fabrication of polydimethylsiloxane shadow masks for chemical solution deposition of CdS thin-film transistors

Thin Solid Films, 2008
Abstract PDMS (polydimethylsiloxane) shadow masks were fabricated by replica molding using laser-patterned metal shadow masks as primary templates, which were applied to solution as well as vapor deposition to prepare patterned thin films on solid substrates.
J.H. Lee, J.W. Yoon, I.G. Kim, J.S. Oh, H.J. Nam, D.Y. Jung   +5 more
openaire   +1 more source

Plume behavior and thin film deposition by laser ablation using a hellicoidal shadow mask

SPIE Proceedings, 2000
The laser ablation is one of the best ways to obtain smooth thin film deposited on various substrates. However, to obtain a `droplets-free surface some special experimental setups are necessary. One of them is the 'eclipse' method, using a plane shadow mask.
Aurelian Marcu, Constantin Grigoriu, W. Jang, Kiyoshi Yatsui   +3 more
openaire   +1 more source

Micromachined, reusable shadow mask for integrated optical elements grown by metalorganic chemical vapor deposition

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1999
Precise three-dimensional control of micro-optical elements has recently been achieved using shadow masked metalorganic chemical vapor deposition (MOCVD) with an epitaxial mask. However, the epitaxial shadow mask used to deposit these precision micro-optics limits the size and shape of the available structures.
G. M. Peake, L. Zhang, N. Y. Li, A. M. Sarangan, C. G. Willison, R. J. Shul, S. D. Hersee   +6 more
openaire   +1 more source

Local PECVD SiOxNy/n-Poly-Si Deposition through a Shadow Mask for POLO IBC Solar Cells

2021
38th European Photovoltaic Solar Energy Conference and Exhibition; 135 ...
Mertens, V., Schäfer, S., Stöhr, M., Mercker, A., Köhler, A., Mettner, L., Brendel, R., Ambrosius, N., Pernau, T., Haverkamp, H., Dullweber, T.   +10 more
openaire   +1 more source

Improved light extraction from LEDs utilizing nonplanar dielectric layers from shadow mask deposition

(CLEO). Conference on Lasers and Electro-Optics, 2005., 2005
We demonstrate improved emission from LEDs and resonant-cavity LEDs (RC-LEDs) via shadow mask deposited nonplanar dielectric layers. We review the shadow mask deposition method, and present detailed studies comparing devices with and without such ...
T.R. Nelson, S. Blickenstaff, A.M. Sarangan, J.E. Ehret   +3 more
openaire   +1 more source

Plume propagation and Pt film growth during shadow-masked pulsed laser deposition in a buffer Ar gas

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2015
Abstract Shadow-masked pulsed laser deposition (SMPLD) enables the preparation of films that contain none of the droplets that are normally formed in laser irradiation of the target. The platinum (Pt) film produced by SMPLD was studied using scanning electron microscopy (SEM), atomic force microscopy (AFM), and Rutherford backscattering spectroscopy (
V.Yu. Fominski, S.N. Grigoriev, A.G. Gnedovets, R.I. Romanov, M.A. Volosova   +4 more
openaire   +1 more source

Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in Si (110)

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2007
The application of a three dimensional, self-aligning shadow mask in (110)-oriented silicon for thin-film metal deposition is discussed. This shadow mask is used for the deposition of metal tracks on the bottom of structures with vertical sidewalls, i.e., the patterning of metal catalytic patches underneath the membrane that covers the deep flow ...
R. M. Tiggelaar, J. W. Berenschot, M. C. Elwenspoek, J. G. E. Gardeniers, R. Dorsman, C. R. Kleijn   +5 more
openaire   +1 more source

Adaptive simulation framework for dynamic shadow mask optimization in physical vapor deposition of optical coatings

Journal of Vacuum Science & Technology B
The deposition of uniform thin films is a critical process requirement in manufacturing precision optical components. Nonuniform thicknesses directly degrade device performance, creating a need for robust process control solutions. This paper presents an adaptive computational framework for the engineering and optimization of shadow masks, designed to ...
Bartolome Reyes Ramirez, Claudia Carballo Manuel, Joel Cervantes-Lozano, Miguel Angel Gonzalez Galicia, Svetlana Mansurova, Nikolai Korneev   +5 more
openaire   +1 more source

Micro- and nano-patterning using local deposition through miniaturized shadow mask

2003
not ...
Kim, G M, Brugger, J
openaire   +2 more sources