Results 81 to 90 of about 35,929 (259)

A Wafer-Level Fabricated Heating–Vacuum Micro-Platform with Resonant MEMS Monolithically Integrated

Micromachines
This paper presents a silicon-based wafer-level vacuum packaging platform with a monolithically integrated micro-oven. This system provides vacuum and constant temperature operating conditions to improve the performance of resonant micro-electro ...
Kaixuan He, Rui Feng, Yu Zheng, Lijian Guo, Qichao Liao, Dongfang Song, Yuan Xiang, Xinxin Li   +7 more
doaj   +1 more source

Synthesis of Silicon Nitride Nanoparticles by Upcycling Silicon Wafer Waste Using Thermal Plasma Jets. [PDF]

Materials (Basel), 2022
Kim TH, Lee S, Park DW.
europepmc   +1 more source

Opportunities of Semiconducting Oxide Nanostructures as Advanced Luminescent Materials in Photonics

Advanced Materials, EarlyView.
The review discusses the challenges of wide and ultrawide bandgap semiconducting oxides as a suitable material platform for photonics. They offer great versatility in terms of tuning microstructure, native defects, doping, anisotropy, and micro‐ and nano‐structuring. The review focuses on their light emission, light‐confinement in optical cavities, and
Ana Cremades, Pedro Hidalgo, David Maestre, Ruth Martínez‐Casado, Emilio Nogales, Beatriz Rodríguez, G. Cristian Vásquez, Bianchi Méndez   +7 more
wiley   +1 more source

Numerical analysis of the use of multiple inlet plates to improve the thickness uniformity of silicon epitaxial layers during atmospheric pressure chemical vapor deposition

Results in Engineering
The further reduction of semiconductor nanometer line width has led to increasingly higher silicon epitaxial film surface flatness requirement. This study conducts a series of numerical simulations to examine the use of multiple inlet plates in an ...
Ba-Phuoc Le, Jyh-Chen Chen, Chieh Hu, Wei-Jie Lin, Chun-Chin Tu, Liang-Chin Chen   +5 more
doaj   +1 more source

Silicon Wafer CMP Slurry Using a Hydrolysis Reaction Accelerator with an Amine Functional Group Remarkably Enhances Polishing Rate. [PDF]

Nanomaterials (Basel), 2022
Bae JY, Han MH, Lee SJ, Kim ES, Lee K, Lee GS, Park JH, Park JG.   +7 more
europepmc   +1 more source

Self‐Assembled Inorganic Nanomembrane Tubes: Rolled‐Up Piezoelectrics for Microacoustic Wave‐Based Actuators and Sensors

Advanced Materials, EarlyView.
This study demonstrates a self‐assembly process to generate free‐standing piezoelectric nanomembranes, forming ultracompact microtubular acoustic wave sensors and actuators. The miniaturized 3D piezoelectric platform reported in this work can be applied in telecommunication, energy harvesting, and acoustofluidics. Moreover, the 3D self‐assembly can add
Raphaël C. L‐M. Doineau, Christian N. Saggau, Stefan Baunack, Thomas Gemming, Yara Abdelaal, Robert Weser, Oliver G. Schmidt, Hagen Schmidt, Andreas Winkler, Mariana Medina‐Sánchez   +9 more
wiley   +1 more source

Detection of subsurface microcracks after grinding of single crystal silicon wafer by polarized laser scattering

Jin'gangshi yu moliao moju gongcheng, 2020
In grinding process, there will inevitably produce subsurface microcrack damages on the monocrystalline silicon wafer. The subsurface microcrack damages of monocrystalline silicon wafer are nondestructively detected by the polarized laser scattering ...
LI Qingpeng, BAI Qian, ZHANG Bi
doaj  

Rapid, noncontact, sensitive, and semiquantitative characterization of buffered hydrogen-fluoride-treated silicon wafer surfaces by terahertz emission spectroscopy. [PDF]

Light Sci Appl, 2022
Yang D, Mannan A, Murakami F, Tonouchi M.   +3 more
europepmc   +1 more source

LEAD: Literature Enhanced Ab Initio Discovery of Nitride Dusting Layers for Enhanced Tunnel Magnetoresistance and Lower Resistance Magnetic Tunnel Junctions

Advanced Materials, EarlyView.
Magnetic tunnel junctions (MTJs) using MgO tunnel barriers face challenges of high resistance‐area product and low tunnel magnetoresistance (TMR). To discover alternative materials, Literature Enhanced Ab initio Discovery (LEAD) is developed. The LEAD‐predicted materials are theoretically evaluated, showing that MTJs with dusting of ScN or TiN on ...
Sabiq Islam, William S. Rogers, Chen‐Yu Hu, Ming‐Yuan Song, Xinyu Bao, Shehrin Sayed, Jean Anne C. Incorvia   +6 more
wiley   +1 more source

Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding. [PDF]

Micromachines (Basel), 2022
Wang Z, He C, Zhang W, Li Y, Gao P, Meng Y, Zhang G, Yang Y, Wang R, Cui J, Wang H, Zhang B, Ren Y, Zhen G, Jiao X, Zhang S.   +15 more
europepmc   +1 more source