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Solidly mounted resonators and filters
1995 IEEE Ultrasonics Symposium. Proceedings. An International Symposium, 2002Acoustic resonators require material interfaces that confine waves to a finite volume in an efficient manner. Conventionally this is achieved by using air or vacuum interfaces at the electrodes. Another technique is to fabricate the resonator onto a set of quarter wavelength thick layers attached to a substrate to form a solidly mounted resonator (SMR).
K.M. Lakin, K.T. McCarron, R.E. Rose
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Resonant frequency tunableness of solidly mounted resonators
Proceedings of the 2010 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, 2010The performance of solidly mounted resonator (SMR) depends on the thickness control of each layer. Since thickness variation is inevitable in film deposition, the resonant frequency will shift from the desired value. In order to calculate the required electrode thickness for a given resonant frequency, an SMR is treated as a combination of two ...
Chien-hao Liu, Yuan-fang Chou
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Thermoelastic FEM-BEM model for Solidly Mounted Resonator
2008 IEEE Ultrasonics Symposium, 2008A Solidly Mounted Resonator (SMR) is an ultra-thin piezoelectric layer deposited between two electrodes which operates in longitudinal thickness mode. Minimization of dissipative losses is a major goal in SMR designs. For an accurate simulation of a SMR vibrating in vacuum, thermoelastic damping phenomenon related to the irreversible heat dissipation ...
Ekeom, D., Dubus, Bertrand
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Plate mode propagation losses in solidly mounted resonators
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2010This paper investigates the acoustic losses of propagating eigenmodes through the acoustic mirror of a solidly mounted resonator (SMR) to clarify how resonator properties are influenced by reflection coefficients for the thickness shear (TS) wave as well as that for the thickness extensional (TE) wave.
Florian, Thalmayr +3 more
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Odorant detection via Solidly Mounted Resonator biosensor
2012 IEEE International Ultrasonics Symposium, 2012In this paper, a biosensors for vapour phase detection of odorant molecules based on Solidly Mounted Resonators (SMRs) is presented. The SMRs were coated with a wild-type bovine odorant-binding protein (wtbOBP), used as sensing layer, and consisted of a piezoelectric aluminium nitride (AlN) film sandwiched between two metal electrodes.
Cannatà€ Domenico +6 more
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Thermal Characterization for Reliability Assessment of Solidly Mounted Resonators
2006 IEEE International Frequency Control Symposium and Exposition, 2006This paper deals with the temperature impact on electrical characteristics of thin film acoustic resonators. Consequences of excessive temperature due to self-heating and harsh environment are investigated. For self-heating aspects, an RF power bench coupled to an infrared camera with a spatial resolution as good as 2 mu/pixels gives us accurate ...
Ivira, B. +5 more
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Solidly Mounted Acoustic Resonator
2012The Solidly Mounted Resonator (SMR) is another kind of FBAR. Bragg acoustic reflector, which is composed of a sequence of a quarter wavelength thick layers of low and high acoustic impedance, is formed under the piezoelectric stack to clamp the acoustic wave energy.
Yafei Zhang, Da Chen
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Solidly-Mounted Agile Resonator / Transducer
2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, 2007Solidly mounted resonators (SMRs) were proposed by Newell in the mid-1960s. Decoupling from the mounting substrate was achieved at a single frequency by a Bragg stack of quarter-wavelength plates. While the initial concept was ahead of fabrication technology, SMRs are now a practical resonator design yielding high Qs in a space-efficient and robust ...
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Nonlinear effects in solidly-mounted ZnO BAW resonators
2008 IEEE Ultrasonics Symposium, 2008The mechanical nonlinearity due to high power level in zinc oxide thin film bulk acoustic wave resonators has been studied in this work. The nonlinear behavior of these resonators was investigated using transmission response measurements. The resonator was decoupled from the 50 Ohm line impedance by 20 pF shunting capacitors in order to allow the ...
Nurmela, Arto +4 more
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P3H-1 Tunable Solidly Mounted Resonators
2007 IEEE Ultrasonics Symposium Proceedings, 2007Solidly-mounted resonator (SMR) configurations were pioneered by Newell in the mid-1960s. In Newell's designs, a piezoelectric resonator was indirectly attached to a substrate by means of an intervening Bragg stack of plates of low and high acoustic impedance, similar to an anti-reflecting optical coating. By proper arrangement of the stack parameters,
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