Results 221 to 230 of about 860 (255)

Proposal of Solidly Mounted Resonator Type Functional Devices

Japanese Journal of Applied Physics, 2006
New device configurations using a solidly mounted piezoelectric thin film resonator (SMR) are proposed. In addition to the piezoelectric layer for the excitation of vibration, an additional piezoelectric layer is added in the SMR. The additional piezoelectric layer functions as an electric coupler.
Takehiko Uno, Shun Fujitsuka, Satoru Noge   +2 more
openaire   +1 more source

AlN solidly mounted resonators for high temperature applications

2014 IEEE International Ultrasonics Symposium, 2014
Monitoring under harsh environments, particularly high temperatures (> 600°C), is on high demand nowadays. Applications such as gas control in propulsion systems or fire detection in early stages are good examples. During the last decades, materials and devices have been extensively investigated for these applications.
T. Mirea, M. DeMiguel-Ramos, M. Clement, J. Olivares, E. Iborra, V. Yantchev, I. Katardjiev   +6 more
openaire   +1 more source

Temperature characteristics of solidly mounted piezoelectric thin film resonators

IEEE Symposium on Ultrasonics, 2003, 2004
Solidly mounted piezoelectric thin film resonators (SMRs), which are consisting of a piezoelectric film on alternating laminated low- and high-acoustic-impedance quarter-wave layers on a substrate, are now receiving attention as bulk acoustic wave devices suitable for use in a super-high-frequency range.
S. Ohta, K. Nakamura, A. Doi, Y. Ishida
openaire   +1 more source

Laterally coupled solidly mounted BAW resonators at 1.9 GHz

2009 IEEE International Ultrasonics Symposium, 2009
Laterally coupled bulk acoustic wave resonators fabricated onto an acoustic mirror are studied. The acoustic mirror comprises two W-SiO 2 pairs. Thin-film AlN is used as the piezoelectric material with a Mo bottom electrode and an Al top electrode. Structures consist of laterally acoustically coupled electrodes 2.5 µm wide and 300 µm long, with gaps ...
Meltaus, Johanna, Pensala, Tuomas, Kokkonen, K., Jansman, A.   +4 more
openaire   +3 more sources

Solidly mounted resonator based on aluminum nitride thin film

1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102), 2002
A piezoelectric thin film sandwiched between two conductors is the basic structure for high frequency bulk acoustic wave devices. For that purpose, AlN thin films deposited by DC reactive sputtering on various electrode materials were investigated. Highly c-axis oriented thin films as thick as 2 /spl mu/m were grown and analyzed.
M.-A. Dubois, P. Muralt, H. Matsumoto, V. Plessky   +3 more
openaire   +1 more source

Simulation and Modeling of a Solidly Mounted Resonator

2017
Solidly mounted resonators (SMRs) have a stable structure, high frequency range, and good process yield, and thus are increasingly being used in various applications, including radiofrequency (RF) communication devices. In this study, we simulated SMR structures and thin films of the piezoelectric materials AlN and ZnO using the commonly used RF design
Sheng-Hui Meng, An-Chi Huang, Ying-Chung Chen   +2 more
openaire   +1 more source

Laser probing and FEM modeling of solidly mounted resonators

1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282), 2003
The ultrasonic vibrations of a solidly mounted resonator are probed utilizing a scanning laser interferometric technique. The vibrations are also simulated using a model of a solidly mounted resonator and applying 2D FEM modeling for the solution of the eigenmodes.
P.T. Tikka, J. Kaitila, J. Ella, T. Makkonen, J.V. Knuuttila, J. Westerholm, M.M. Salomaa   +6 more
openaire   +1 more source

Influence of induced stress on AlN-solidly mounted resonators

2016 European Frequency and Time Forum (EFTF), 2016
The frequency variation of solidly mounted resonators made with AlN thin films operating in longitudinal and shear acoustic modes with induced in plane mechanical strain is presented. The induced deformation range is in the hundreds of microstrains and the frequency variations in the hundreds of kHz, giving coefficients of resonant frequency with ...
A. Delicado, M. Clement, J. Olivares, T. Mirea, B. Diaz-Duran, E. Iborra   +5 more
openaire   +1 more source

P1J-7 Solidly Mounted Resonator (SMR) FEM-BEM Simulation

2006 IEEE Ultrasonics Symposium, 2006
Solidly Mounted Resonators (SMR) are alternatives to membrane resonators to realize Bulk Acoustic Wave (BAW) filters for RF communication systems. SMR decoupling from substrate, which is realized with a multi-layered Bragg reflector, has a major influence on resonator performance (quality factor, spurious modes).
A. Volatier, B. Dubus, D. Ekeom
openaire   +1 more source

Thermal transient characteristics of zinc oxide solidly mounted resonators

2012 IEEE International Frequency Control Symposium Proceedings, 2012
Thin film bulk acoustic wave (BAW) resonators have been the subject of research for many years due to their uses in wireless communications and chemical sensing. Both the steady-state and dynamic temperature characteristics of quartz resonators, such as those used in biosensing, have been studied in the past.
Stephen J. Mihalko, Warsame Heban, William D. Hunt, Adam D. Wathen   +3 more
openaire   +1 more source