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Optimization of acoustic mirrors for solidly mounted BAW resonators
IEEE Ultrasonics Symposium, 2005., 2006The overall performance of bulk acoustic wave (BAW) filters is dominated by the effective coupling coefficient and the quality factor of the constituting BAW resonators. Whereas the effective coupling coefficient and its dependency on the layer stack is quite accurately modeled with a simple one-dimensional acousto-electric model (e.g ...
S. Marksteiner +3 more
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Broadband characterization of zinc oxide-based solidly mounted resonators
Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition (Cat. No.02CH37234), 2003In recent years, a considerable amount of research has been conducted on thin film bulk acoustic wave (BAW) resonators in the area of RF microelectronics. They are attractive to the field because of their relatively small size and potential for fabrication on-chip. Several configurations are common, the solidly mounted resonator (SMR) being among them.
S. Pinkett +3 more
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Modelling of 2-D lateral modes in solidly-mounted BAW resonators
2008 IEEE Ultrasonics Symposium, 2008Lateral resonances occurring in bulk acoustic wave resonators contribute to the device operation, e.g., by creating spurious electrical responses. Predicting lateral effects in two dimensions typically requires computationally heavy 3-D finite element modelling. Here, dispersion characteristics calculated using a 1-D transfer matrix model are used in a
Meltaus, Johanna +3 more
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Analysis of resonance characteristics of solidly mounted resonator for mass sensing applications
Applied Physics A, 2014Solidly mounted resonators (SMRs) have recently been adopted as alternatives to quartz crystal microbalance in bio-molecular and chemical detection field. In this study, the resonance characteristics of highly c-axis-textured AlN film-based SMR were investigated to obtain better sensitivity for mass sensing applications.
J. Xiong +4 more
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Solidly Mounted Resonator with Optimized Acoustic Reflector
2009The quality factor (Q) of the Solidly Mounted Resonator is limited by acoustic losses caused by waves leaking through the mirror stack. Traditionally employed acoustic mirror reflects only longitudinal waves and not shear waves. Starting with the stop-band theory and the principle of spacer layers in Optics, we present a design procedure which gives ...
Jose, Sumy +2 more
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Ovenized Dual-Mode ZnO-based Solidly Mounted Resonator
2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2023A. Tamboli +5 more
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