Results 41 to 50 of about 26,685 (293)

A Method of Precise Auto-Calibration in a Micro-Electro-Mechanical System Accelerometer

Sensors
A novel design of a MEMS (Micro-Electromechanical System) capacitive accelerometer fabricated by surface micromachining, with a structure enabling precise auto-calibration during operation, is presented.
Sergiusz Łuczak, Magdalena Ekwińska, Daniel Tomaszewski   +2 more
doaj   +1 more source

Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

, 2014
We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls.
Cheng, Ya, Fang, Wei, He, Fei, Lin, Jintian, Song, Jiangxin, Tang, Jialei, Wang, Nengwen, Xu, Yingxin   +7 more
core   +1 more source

Ion beam micromachining of integrated optics components [PDF]

, 1973
Thin film integrated optics components such as light guides, modulators, directional couplers, and polarizers demand high quality edge smoothness and high resolution pattern formation in dimensions down to submicrometer size.
Garmire, E., Garvin, Hugh L., Somekh, S., Stoll, H., Yariv, A.   +4 more
core   +1 more source

Surface micromachined magnetic actuators [PDF]

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems, 2002
A surface micromachined micromagnetic actuator (also called a magnetic flap) as an integrated part of an active micro electromechanical fluid control system is described. The flaps are fabricated by surface micromachining technology and are capable of achieving large deflections (above 100 /spl mu/m) with magnetic forces in stationary air.
Liu, Chang, Tsao, Tom, Tai, Yu-Chong, Ho, Chih-Ming   +3 more
openaire   +2 more sources

Low‐Angle Grain Boundaries and Re‐Segregation in Single‐Crystalline Ni‐Base Superalloys

Advanced Engineering Materials, EarlyView.
This work demonstrates that Re‐segregation at low‐angle grain boundaries (LAGBs) in Ni‐base superalloys is influenced by misorientation angle. Advanced microscopy and atom probe tomography reveal that higher misorientation angles increases Re‐segregation.
Alireza B. Parsa, Aparna Saksena, Alesander Kostka, Pascal Thome, Felicitas Scholz, Alexandre Mussi, Christoph Somsen, Baptiste Gault, Jan Frenzel, Gunther Eggeler   +9 more
wiley   +1 more source

Surface Microfabrication of Lactic Acid–Glycolic Acid Copolymers Using a Gas-Permeable Porous Mold

Macromol
We attempted to perform surface microfabrication of the bioabsorbable material lactic acid–glycolic acid copolymer (LG-80) using a micro-imprint lithography technique with a gas-permeable porous mold at less than 5 °C.
Mano Ando, Yuna Hachikubo, Sayaka Miura, Rio Yamagishi, Naoto Sugino, Takao Kameda, Yoshiyuki Yokoyama, Satoshi Takei   +7 more
doaj   +1 more source

Hot‐Film and Calorimetric Methods With Transient Heating for Measurement of High Biofluid Flow Rate

Advanced Functional Materials, EarlyView.
Accurate measurement of biofluid flow rate is vital for clinical diagnostics. We propose a transient heating strategy using short thermal pulses and peak temperature tracking to enhance the flow sensitivity of the hot‐Film and calorimetric methods. Simulations show how optimal heating time maximizes sensitivity across flow rates.
Yuanting Wei, Shupeng Li, Kyung Rok Pyun, Tianyu Yang, Bosung Kim, Haotian Yang, John A. Rogers, Yonggang Huang, Haohui Zhang   +8 more
wiley   +1 more source

Micromachining of Transparent Biocompatible Polymers Applied in Medicine Using Bursts of Femtosecond Laser Pulses

Micromachines, 2020
Biocompatible polymers are used for many different purposes (catheters, artificial heart components, dentistry products, etc.). An important field for biocompatible polymers is the production of vision implants known as intraocular lenses or custom-shape
Evaldas Kažukauskas, Simas Butkus, Piotr Tokarski, Vytautas Jukna, Martynas Barkauskas, Valdas Sirutkaitis   +5 more
doaj   +1 more source

Cyclic Olefin Copolymers as Versatile Materials for Advanced Engineering Applications

Advanced Functional Materials, EarlyView.
Cyclic olefin copolymers (COCs) are presented as highly versatile materials combining tunable synthesis, excellent optical properties, and mechanical robustness. Their potential spans microfluidics, bioengineering, and advanced electronics, while emerging self‐healing and sustainable solutions highlight future opportunities.
Giulia Fredi, Norma Mallegni, Andrea Dorigato, Mario Milazzo   +3 more
wiley   +1 more source

Electrochemical micromachining on nickel and nickel-based superalloys with two-tone sinusoidal signal

Electrochemistry Communications
Electrochemical micromachining is an emerging technology in the machining field. This method offers several advantages such as exceptional surface quality, minimal cathode depletion, and a high elimination rate. Often, an ultrashort pulse power supply is
Xin Wang, Yan Peng
doaj   +1 more source