Results 31 to 40 of about 26,685 (293)
Micro and Nano Systems Letters, 2022 Silicon bulk micromachining is extensively employed method in microelectromechanical systems (MEMS) for the formation of freestanding (e.g., cantilevers) and fixed (e.g., cavities) microstructures.
S. Purohit +3 more
doaj +1 more source
Ablation debris control by means of closed thick film filtered water immersion [PDF]
, 2010 The performance of laser ablation generated debris control by means of open immersion techniques have been shown to be limited by flow surface ripple effects on the beam and the action of ablation plume pressure loss by splashing of the immersion fluid ...
Bickel W. S. +8 more
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Effect of laser beam trajectory on pocket geometry in laser micromachining
Open Engineering, 2020 The article presents the problem of planning the laser beam trajectory for the laser micromachining process. The article concerns on the ablative laser micromachining issues.
Witkowski Grzegorz +2 more
doaj +1 more source
Strategies for improved temporal response of glass-based optical switches
Scientific Reports, 2022 We present an optimization of the dynamics of integrated optical switches based on thermal phase shifters. These devices have been fabricated in the volume of glass substrates by femtosecond laser micromachining and are constituted by an integrated Mach ...
Matteo Calvarese +6 more
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Micromachines, 2022 Capacitive micromachined ultrasonic transducers (CMUTs) represent an accepted technology for ultrasonic transducers, while high bias voltage requirements and limited output pressure still need to be addressed. In this paper, we present a design for ultra-
Fabian Merbeler +4 more
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Design and Performance of a Focus-Detection System for Use in Laser Micromachining
Micromachines, 2016 We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work ...
Binh Xuan Cao +6 more
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Investigation of the effects of machining parameters on surface integrity in micromachining
Open Chemistry, 2022 In this study, the effect of cutting conditions on surface integrity was investigated in micromilling of magnesium alloy (AZ91). Microtool diameter, cutting speed, feed rate, and depth of cut parameters are used.
Etyemez Ayhan, Aydin Umut
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Analysis of Optical Diffraction Profiles Created by Phase-Modulating MEMS Micromirror Arrays
Micromachines, 2021 This paper presents modeling and analysis of light diffraction and light-intensity modulation performed by an optical phased array (OPA) system based on metal-coated silicon micromirrors.
Tarek Mohammad +2 more
doaj +1 more source
Floating-disk parylene micro check valve [PDF]
, 2007 A novel micro check valve which has nearly ideal fluidic shunting behaviors is presented. Featuring a parylene-based floating disk, this surface-micromachined check valve ultimately realizes both zero forward cracking pressure and zero reverse ...
Chen, Po-Jui, Tai, Yu-Chong
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Note: femtosecond laser micromachining of straight and linearly tapered capillary discharge waveguides [PDF]
, 2011 Gas-filled capillary discharge waveguides are important structures in laser-plasma interaction applications, such as the laser wakefield accelerator. We present the methodology for applying femtosecond laser micromachining in the production of capillary ...
Abu-Azoum, Salima Saleh +7 more
core +1 more source