Results 11 to 20 of about 26,685 (293)

Surface-micromachined resonant accelerometer [PDF]

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 2002
This paper discusses the design and testing of a resonant accelerometer developed for integrated surface-micromachining processes. First- and second-generation designs are presented. The sensors use leverage mechanisms to transfer force from a proof mass to double-ended tuning fork (DETF) resonators used as force transducers.
Roessig, T. A., Howe, R. T., Pisano, A. P., Smith, J. H.   +3 more
openaire   +3 more sources

Wedge Surface Plasmon Polariton Waveguides Based on Wet-Bulk Micromachining [PDF]

Photonics, 2019
In this paper, we propose and investigate the modal characteristics of wedge surface plasmon polariton (SPP) waveguides for guiding surface plasmon waves.
Nguyen Thanh Huong, Nguyen Van Chinh, Chu Manh Hoang   +2 more
doaj   +2 more sources

Annular Surface Micromachining of Titanium Tubes Using a Magnetorheological Polishing Technique. [PDF]

Micromachines (Basel), 2020
Song W, Peng Z, Li P, Shi P, Choi SB.
europepmc   +3 more sources

Surface Modification of Magnetoactive Elastomers by Laser Micromachining [PDF]

Materials
It has been recently demonstrated that laser micromachining of magnetoactive elastomers is a very convenient method for fabricating dynamic surface microstructures with magnetically tunable properties, such as wettability and surface reflectivity.
Izidor Straus, Gaia Kravanja, Luka Hribar, Raphael Kriegl, Matija Jezeršek, Mikhail Shamonin, Irena Drevensek-Olenik, Gašper Kokot   +7 more
openaire   +5 more sources

Stress Distribution Profile Imaging With Spectral Fabry-Perot Interferometry in Thin Layer Substrates for Surface Micromachining. [PDF]

Micromachines (Basel), 2017
Inzelberg A, Linzon Y.
europepmc   +3 more sources

Surface Quality Optimization in Micromachining with Cutting Tool Having Regular Constructive Geometry

Micromachines, 2022
In this paper we studied the influence of micromachining parameters on processed surface quality. Usually in discussions about micro-cutting or micromachining, the grinding or diamond turning processes are considered.
Catalin Gabriel Dumitras, Dragos Florin Chitariu, Florin Chifan, Cristina Georgiana Lates, Mihaita Horodinca   +4 more
doaj   +1 more source

The Capabilities of Spark-Assisted Chemical Engraving: A Review

Journal of Manufacturing and Materials Processing, 2020
Brittle non-conductive materials, like glass and ceramics, are becoming ever more significant with the rising demand for fabricating micro-devices with special micro-features.
Zahraa Bassyouni, Jana D. Abou Ziki
doaj   +1 more source

Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining

Micromachines, 2014
Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much research
K. M. Tanvir Ahmmed, Colin Grambow, Anne-Marie Kietzig   +2 more
doaj   +1 more source

Stiction in surface micromachining [PDF]

Journal of Micromechanics and Microengineering, 1996
Due to the smoothness of the surfaces in surface micromachining, large adhesion forces between fabricated structures and the substrate are encountered. Four major adhesion mechanisms have been analysed: capillary forces, hydrogen bridging, electrostatic forces and van der Waals forces.
Tas, Niels Roelof, Sonnenberg, A.H., Jansen, Henricus V., Legtenberg, R., Legtenberg, Rob, Elwenspoek, Michael Curt   +5 more
openaire   +2 more sources

Micro systems technology [PDF]

, 1994
The emerging field of Micro Systems Technology is described. Micro Systems Technology can be seen as the meeting of disciplines, a product of convergence along different lines.
Fluitman, Jan H.J
core   +2 more sources