Results 21 to 30 of about 26,685 (293)
Design, Fabrication and Measurement of Radio Frequency Micro-Electro-Mechanical Systems
IEEE Open Journal of Nanotechnology, 2023 This article describes the fabrication and experimental results of a novel step structure Radio Frequency Microelectromechanical system (RF MEMS) switch integrated with a circular patch antenna.
Girija Sravani Kondavitee +5 more
doaj +1 more source
Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition and single-crystal diamond micro tools [PDF]
, 2010 Insufficient experimental data from various micro tools limit industrial application of the micromilling process. This paper presents an experimental comparative investigation into micromilling of oxygen-free, high-conductivity copper using tungsten ...
Cheng, K, Huo, D
core +1 more source
Micromachining of buried micro channels in silicon [PDF]
, 2000 A new method for the fabrication of micro structures for fluidic applications, such as channels, cavities, and connector holes in the bulk of silicon wafers, called buried channel technology (BCT), is presented in this paper.
Berenschot, J.W. (Erwin) +7 more
core +3 more sources
Micromachines, 2021 An omnidirectional inertial switch with rectangular spring is proposed in this paper, and the prototype has been fabricated by surface micromachining technology.
Wenguo Chen +3 more
doaj +1 more source
Design of a pulse power supply unit for micro-ECM [PDF]
, 2014 Electrochemical micro-machining (μECM) requires a particular pulse power supply unit (PSU) to be developed in order to achieve desired machining performance. This paper summarises the development of a pulse PSU meeting the requirements of μECM. The pulse
A Muetze +28 more
core +1 more source
Micromachines, 2020 Wire electrochemical micromachining (WECMM) technology is regarded a promising method to fabricate high aspect ratio microstructures on hard-to-machining materials, however, the by-product accumulation in the machining gap limits its application. In this
Siying Ling +4 more
doaj +1 more source
Effects of closed immersion filtered water flow velocity on the ablation threshold of bisphenol A polycarbonate during excimer laser machining [PDF]
, 2010 A closed flowing thick film filtered water immersion technique ensures a controlled geometry for both the optical interfaces of the flowing liquid film and allows repeatable control of flow-rate during machining.
Dowding, Colin +2 more
core +1 more source
Surface micromachined membranes for tunnel transducers [PDF]
, 1997 We have developed low-temperature surface micromachining procedures for the fabrication of suspended SiO2/Si3N4 membranes. This fabrication method was integrated with electron beam lithography, anisotropic ion etching, and electroplating to construct ...
George, Thomas +2 more
core +1 more source
Surface micromachined capacitive ultrasonic transducers [PDF]
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1998 The current state of novel technology, surface microfabricated ultrasonic transducers, is reported. Experiments demonstrating both air and water transmission are presented. Air-coupled longitudinal wave transmission through aluminum is demonstrated, implying a 110 dB dynamic range for transducers at 2.3 MHz in air. Water transmission experiments from 1
Ladabaum, I. +4 more
openaire +4 more sources
Micromachining of AlN and Al2O3 Using Fiber Laser
Micromachines, 2014 We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm2 for alumina and 18 J/cm2 for aluminum nitride.
Florian Preusch +2 more
doaj +1 more source