Surface micromachining of polydimethylsiloxane for microfluidics applications. [PDF]
Biomicrofluidics, 2016 Polydimethylsiloxane (PDMS) elastomer has emerged as one of the most frequently applied materials in microfluidics. However, precise and large-scale surface micromachining of PDMS remains challenging, limiting applications of PDMS for microfluidic structures with high-resolution features.
Hill S, Qian W, Chen W, Fu J.
europepmc +5 more sources
Innovative Method Using Adhesive Force for Surface Micromachining of Carbon Nanowall [PDF]
Nanomaterials, 2020 The application of a carbon nanowall (CNW) via transfer is very demanding due to the unusual structure of vertically grown wall-shaped that easily collapses.
Hyeokjoo Choi +6 more
doaj +2 more sources
Hard-Baked Photoresist as a Sacrificial Layer for Sub-180 °C Surface Micromachining Processes [PDF]
Micromachines, 2018 This letter proposes a method for utilizing a positive photoresist, Shipley 1805, as a sacrificial layer for sub-180 °C fabrication process flows. In the proposed process, the sacrificial layer is etched at the end to release the structures using a ...
Hani H. Tawfik +3 more
doaj +2 more sources
Photolithographic surface micromachining of polydimethylsiloxane (PDMS). [PDF]
Lab Chip, 2012 A major technical hurdle in microfluidics is the difficulty in achieving high fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report a simple yet highly precise and repeatable PDMS surface micromachining method using direct photolithography followed by reactive ion etching (RIE).
Chen W, Lam RH, Fu J.
europepmc +4 more sources
Surface micromachined mechanisms and micromotors [PDF]
Journal of Micromechanics and Microengineering, 1991 Electric micromotors are sub-millimeter sized actuators capable of unrestrained motion in at least one degree of freedom. Polysilicon surface micromachining using heavily phosphorus-doped LPCVD polysilicon for the structural material, LPCVD silicon ...
Mehregany, Mehran, Tai, Yu-Chong
core +3 more sources
Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures [PDF]
, 2003 We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK.
Baar, J.J.J. van +7 more
core +29 more sources
Experimental Optimization of Process Parameters in CuNi18Zn20 Micromachining
Micromachines, 2021 Ultraprecision micromachining is a technology suitable to fabricate miniaturized and complicated 3-dimensional microstructures and micromechanisms.
Andrea Abeni +3 more
doaj +1 more source
Crystals, 2022 Functional wetting surfaces have excellent prospects in applications including self-cleaning, anti-fog, anti-icing, corrosion resistance, droplet control, and friction power generation.
Yang Liu +8 more
doaj +1 more source
Prediction of Thermal Damage upon Ultrafast Laser Ablation of Metals
Molecules, 2021 Ultrafast lasers micromachining results depend on both the processing parameters and the material properties. The obtained thermal effects are negligible if a good combination of processing parameters is chosen.
Liliana Cangueiro +2 more
doaj +1 more source
Laser Micromachining of Lithium Niobate-Based Resonant Sensors towards Medical Devices Applications
Sensors, 2020 This paper presents a micromachining process for lithium niobate (LiNbO3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material.
Zeyad Yousif Abdoon Al-Shibaany +3 more
doaj +1 more source