Intrinsically flexible multimode reconfigurable transistors for polymorphic circuits and neuromorphic devices. [PDF]
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Numerical Simulations of Silicon Nitride Etching in V-NAND Structures
2023 IEEE 23rd International Conference on Nanotechnology (NANO), 2023This work proposes the modeling for predicting the etching process of silicon nitride films in phosphoric acid. The model is established based on the Eley-Rideal surface reaction mechanism and validated by the comparisons against experimental data.
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