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3D VG-Type NAND Flash Memories
2016The common feature among the different 3D NAND solutions is constituted by very deep vertical (z direction) etching steps that define the Flash cells geometries simultaneously. Transistor geometries are formed by the deep trench through a multiple polysilicon/oxide stack.
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3D-NAND Flash and Its Manufacturing Process
2016Flash memory chips are nonvolatile memory (NVM) chips, which can keep memory without power supply. In comparison, DRAM is volatile memory and needs a power supply. Flash memory chips, especially NAND flash memory chips, are commonly used in universal serial bus (USB) drives, secure digital (SD) cards, and SSDs.
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Trends and Future Challenges of 3D NAND Flash Memory
2023 IEEE International Memory Workshop (IMW), 2023Sun Il Shim +2 more
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3D-NAND flash memory based neuromorphic computing
Wuli Xuebao/Acta Physica Sinica, 2022Yuhui He
exaly
Scaling Perspectives on 3D NAND Flash
Extended Abstracts of the 2022 International Conference on Solid State Devices and Materials, 2022openaire +1 more source
Characterization of asymmetries in 3D NAND memory devices
Metrology, Inspection, and Process Control XXXVII, 2023Jie Li +14 more
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Carbon Plug Application in 3D NAND Fabrication
2022 IEEE International Interconnect Technology Conference (IITC), 2022Yu-Chih Chang +6 more
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A DTCO Framework for 3D NAND Flash Readout
2024 Design, Automation & Test in Europe Conference & Exhibition (DATE)Mattia Gerardi +6 more
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