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3D NAND Flash Architectures

2015
Because NAND Flash possesses several advantages such as very high density, low cost, low power consumption, high programming and reading throughput, and compact form factor, it has been widely adopted as a necessary key component of most modern consumer electronics.
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3D Charge Trap NAND Flash Memories

ECS Transactions, 2016
This chapter starts off with 2 vertical channel architectures named BiCS (Bit Cost Scalable) and P-BiCS (Pipe-Shaped BiCS), respectively. BiCS was proposed for the first time by Toshiba in 2007, and another version called P-BiCS was presented in 2009 to improve retention, source selector performances and source line resistance.
Luca Crippa, Rino Micheloni
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3D NAND Flash Status and Trends

2022 IEEE International Memory Workshop (IMW), 2022
Lars Heineck, Jin Liu
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Error Generation for 3D NAND Flash Memory

2022 Design, Automation & Test in Europe Conference & Exhibition (DATE), 2022
Weihua Liu   +4 more
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Scaling directions for 2D and 3D NAND cells

2012 International Electron Devices Meeting, 2012
This paper describes NAND cell scaling directions for 20nm and beyond. Many of the 2D NAND cell scaling challenges can be resolved by a planar floating gate (FG) cell. Scaling directions and key technology requirements for 3D NAND are also discussed.
Akira Goda, Krishna Parat
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Etching of Silicon Nitride in 3D NAND Structures

ECS Meeting Abstracts, 2015
3D NAND structures present a unique difficulty in semiconductor device manufacturing.  One method of production consists of cylindrical structures made of alternating layers of silicon dioxide (SiO2) and silicon nitride (SiN) with a core of SiO2.  As part of the device manufacturing process the SiN is etched away, leaving the SiO2 core with disc-shaped
Derek Bassett   +2 more
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Etch Challenges for 3D NAND Flash Technology

ECS Meeting Abstracts, 2014
Current 2D NAND scaling is approaching technology limitation in both lithography and device performance arena. To address the lithography challenges at the 1x nodes and the well-known scaling issues associated with planar NAND, 3D flash technology is being developed and is expected to greatly reduce the lithography burden albeit shifting it to ...
Anisul Haque Khan   +4 more
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3D NAND Scaling in the next decade

2022 International Electron Devices Meeting (IEDM), 2022
Russ Meyer   +2 more
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3D Floating Gate NAND Flash Memories

2016
Planar NAND Flash memories (commercially available) are based on Floating Gate, which has been developed and engineered for many decades. Therefore, there have been many attempts to develop 3D Floating Gate cells in order to re-use all the know-how cumulated over time.
Rino Micheloni, Luca Crippa
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