Results 1 to 10 of about 355,263 (316)
The use of computational modelling and simulation methodologies has grown in recent years as researchers try to understand the atomic layer deposition (ALD) process and create new microstructures and nanostructures.
Sibanda David +2 more
doaj +2 more sources
Fabrication of β-Ga2O3 Nanotubes via Sacrificial GaSb-Nanowire Templates
β-Ga2O3 nanostructures are attractive wide-band-gap semiconductor materials as they exhibit promising photoelectric properties and potential applications.
Lei Shangguan +9 more
doaj +1 more source
Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Gallium Nitride [PDF]
Bernhard Y. van der Wel +3 more
doaj +2 more sources
Emerging Atomic Layer Deposition for the Development of High-Performance Lithium-Ion Batteries
With the increasing demand for low-cost and environmentally friendly energy, the application of rechargeable lithium-ion batteries (LIBs) as reliable energy storage devices in electric cars, portable electronic devices and space satellites is on the rise.
Sina Karimzadeh +3 more
semanticscholar +1 more source
Recent Progress of Atomic Layer Technology in Spintronics: Mechanism, Materials and Prospects
The atomic layer technique is generating a lot of excitement and study due to its profound physics and enormous potential in device fabrication. This article reviews current developments in atomic layer technology for spintronics, including atomic layer ...
Yuanlu Tsai, Zhiteng Li, Shaojie Hu
doaj +1 more source
Atomic layer deposition to heterostructures for application in gas sensors
Atomic layer deposition (ALD) is a versatile technique to deposit metals and metal oxide sensing materials at the atomic scale to achieve improved sensor functions.
Hongyin Pan +5 more
semanticscholar +1 more source
Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching
The growing need for increasingly miniaturized devices has placed high importance and demands on nanofabrication technologies with high-quality, low temperatures, and low-cost techniques.
William Chiappim +9 more
doaj +1 more source
Atomic Layer Deposition of Nanolayered Carbon Films
In this paper, carbon thin films were grown using the plasma-enhanced atomic layer deposition (PE-ALD). Methane (CH4) was used as the carbon precursor to grow the carbon thin film.
Zhigang Xiao +2 more
doaj +1 more source
Advances in Atomic Layer Deposition
Atomic layer deposition (ALD) is a thin-film fabrication technique that has great potential in nanofabrication. Based on its self-limiting surface reactions, ALD has excellent conformality, sub-nanometer thickness control, and good process compatibility.
Jingming Zhang +3 more
semanticscholar +1 more source
A multiscale structure is realized through layer-by-layer deposition with atom-scale precision via atomic layer deposition FeSiAl@ZnO@Al 2 O 3 exhibits record-high absorption properties in low-frequency bands.
Wei Tian +7 more
semanticscholar +1 more source

