Results 11 to 20 of about 86,737 (303)

Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Gallium Nitride [PDF]

ACS Omega
Bernhard Y. van der Wel, Kees van der Zouw, Antonius A.I. Aarnink, Alexey Y. Kovalgin   +3 more
doaj   +2 more sources

Plasma-Assisted Atomic Layer Deposition of IrO₂ for Neuroelectronics

Nanomaterials, 2023
In vitro and in vivo stimulation and recording of neuron action potential is currently achieved with microelectrode arrays, either in planar or 3D geometries, adopting different materials and strategies. IrO2 is a conductive oxide known for its excellent
Valerio Di Palma, Andrea Pianalto, Michele Perego, Graziella Tallarida, Davide Codegoni, Marco Fanciulli   +5 more
doaj   +1 more source

Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition

Crystals, 2021
In this study, we report on the deposition of a highly crystalline AlN interfacial layer on GaN at 330 °C via plasma-enhanced atomic layer deposition (PEALD). Trimethylaluminum (TMA) and NH3 plasma were used as the Al and N precursors, respectively.
Il-Hwan Hwang, Myoung-Jin Kang, Ho-Young Cha, Kwang-Seok Seo   +3 more
doaj   +1 more source

Development and Prospect of Process Models and Simulation Methods for Atomic Layer Deposition

Journal of Microelectronic Manufacturing, 2019
Thin film deposition is one of the most important processes in IC manufacturing. In this paper, several typical models and numerical simulation methods for thin film deposition and atomic layer deposition are introduced. Several modeling methods based on
Lei Qu, Rui Chen, Xiaoting Li, Jing Zhang, Yanrong Wang, Shuhua Wei, Jiang Yan, Yayi Wei   +7 more
doaj   +1 more source

Particle atomic layer deposition [PDF]

Journal of Nanoparticle Research, 2019
The functionalization of fine primary particles by atomic layer deposition (particle ALD) provides for nearly perfect nanothick films to be deposited conformally on both external and internal particle surfaces, including nanoparticle surfaces. Film thickness is easily controlled from several angstroms to nanometers by the number of self-limiting ...
openaire   +2 more sources

Atomic layer deposition for quantum dots based devices

Opto-Electronic Advances, 2020
Quantum dots (QDs) are promising candidates for the next-generation optical and electronic devices due to the outstanding photoluminance efficiency, tunable bandgap and facile solution synthesis.
Zhou Binze, Liu Mengjia, Wen Yanwei, Li Yun, Chen Rong   +4 more
doaj   +1 more source

Tuning the Electrical Properties of Titanium Oxide Bilayers Prepared by Atomic Layer Deposition at Different Temperatures [PDF]

, 2019
Carrier‐selective contacts prepared by atomic layer deposition (ALD) have received significant attention for developing high‐efficiency solar cells. Herein, the electrical properties of titanium oxide (TiOx) prepared by ALD are manipulated by modulating ...
Noritaka Usami, Takeya Mochizuki, Yasuyoshi Kurokawa, Kurokawa, Yasuyoshi, Kazuhiro Gotoh, Mochizuki, Takeya, Usami, Noritaka, Gotoh, Kazuhiro   +7 more
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Coating strategies for atomic layer deposition

Nanotechnology Reviews, 2017
Atomic layer deposition (ALD) is a vapor phase technique capable of producing a variety of materials. It consists of the alternation of separate self-limiting surface reactions, which enables accurate control of film thickness at the Angstrom level.
Hu Liang, Qi Weihong, Li Yejun
doaj   +1 more source

Atomic Layer Deposition of Metal Phosphates [PDF]

ECS Meeting Abstracts, 2022
Since the introduction of lithium iron phosphate (LFP) as an electrode material for Li-ion batteries (LIB’s), metal phosphates in general have become increasingly important. The strong covalency of the P-O bonds typically results in a very good thermal and structural stability, which is one of the main reasons for the success of LFP as a LIB ...
Lowie Henderick, Arpan Dhara, Andreas Werbrouck, Jolien Dendooven, Christophe Detavernier   +4 more
openaire   +2 more sources

Defect Detection in Thin-film Photovoltaics; Towards Improved Efficiency and Longevity [PDF]

, 2014
The photovoltaic (PV) industry is seeking to increase efficiency and functional lifetime of PV modules manufactured on polymer substrates. High resolution and high speed surface inspection for the quality control of the manufacture of large area flexible
Robbins, David, Robbins, D., Blunt, Liam, Fleming, Leigh, M. Elrawemi, Fleming, L., Centre for Precision Technologies, Huddersfield University, West Yorkshire. UK, Blunt, L., Sweeney, Francis, L. Blunt, D. Robbins, Elrawemi, Mohamed, L. Fleming, Centre for Process Innovation Limited, Sedgefield, County Durham. UK, F. Sweeney, Sweeney, F.   +15 more
core   +1 more source