Gas- versus Liquid-Phase Silylation as a Way to Inhibit Thin-Film Atomic Layer Deposition (ALD) on Silicon Oxide Substrates. [PDF]
Alam MS, Motin MA, Zaera F.
europepmc +1 more source
Investigation and Optimization of Process Parameters on Growth Rate in Al<sub>2</sub>O<sub>3</sub> Atomic Layer Deposition (ALD) Using Statistical Approach. [PDF]
Pan D, Lei Y.
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Impact of variations in ALD procedure on nanomorphology, protecting properties and chemical stability of thin TiO<sub>2</sub> films. [PDF]
Krýsová H +4 more
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Reduced Lattice Thermal Conductivity in Thermoelectric α-MgAgSb via Sb<sub>2</sub>Te<sub>3</sub> Powder Atomic Layer Deposition. [PDF]
García Santamaría I +9 more
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High-performance ionomer-free gas diffusion cathodes with low Pt loading for proton exchange membrane water electrolysis. [PDF]
Chen M +6 more
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Constructing (101)-Oriented Anatase TiO<sub>2</sub> Seed Layers on Amorphous Microchannel Plate Glass: Surface Energetics and Template-Assisted Oriented Growth. [PDF]
Li X +8 more
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Comparative Analysis of Annealing-Dissolution Techniques for Hollow Submicron Metal Oxide Fiber Synthesis. [PDF]
Georgieva B +8 more
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TiO2/HfO2 bi-layer gate stacks grown by atomic layer deposition for germanium-based metal-oxide-semiconductor devices using GeOxNy passivation layer [PDF]
Caymax, Matty +9 more
core +1 more source
Filtered Cathodic Vacuum Arc Deposition for Inkjet-Printed OLED Encapsulation. [PDF]
Gao Z +5 more
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Synthesis of heteroleptic [Sr(ddemap)(tmhd)]<sub>2</sub> and its use in atomic layer deposition of low carbon SrO thin films. [PDF]
Lee Y +11 more
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