Results 11 to 20 of about 6,984 (242)
System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC [PDF]
Microsystems & NanoengineeringWe present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses mechanical, thermal, and electrical domains to facilitate the co-design of a MEMS sensor ...
Linze Hong +4 more
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Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing [PDF]
Sensors, 2020 Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing.
Rafel Perello-Roig +3 more
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CMOS MEMS Design and Fabrication Platform
Frontiers in Mechanical Engineering, 2022 This article mainly describes the technology related to the CMOS MEMS process platform provided by the Taiwan Semiconductor Research Institute (TSRI), including the process flow, design verification, back-end dicing, and packaging of the CMOS MEMS ...
Sheng-Hsiang Tseng
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Phase Noise Reduction in a VHF MEMS-CMOS Oscillator Using Phononic Crystals
IEEE Journal of the Electron Devices Society, 2016 This paper presents experimental results showing reduced phase noise in a very high frequency band microelectromechanical systems (MEMS) oscillator. This has been achieved by engineering the embedded MEMS resonator with phononic crystal structures.
Pei Qin +3 more
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A CMOS-MEMS Pixel Sensor for Thermal Neutron Imaging. [PDF]
Micromachines (Basel), 2023 Mendicino R, Dalla Betta GF.
europepmc +3 more sources
A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation. [PDF]
Sensors (Basel), 2020 Sánchez-Chiva JM +3 more
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Fabrication and characterization of CMOS-MEMS magnetic microsensors. [PDF]
Sensors (Basel), 2013 This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force.
Hsieh CH, Dai CL, Yang MZ.
europepmc +5 more sources
Monolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Scheme [PDF]
Micromachines, 2018 A monolithic low noise and low zero-g offset CMOS/MEMS accelerometer and readout scheme in standard 0.18 μm CMOS mixed signal UMC process is presented. The low noise chopper architecture and telescopic topology is developed to achieve low noise. The
Yu-Sian Liu, Kuei-Ann Wen
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High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer [PDF]
Micromachines, 2018 In this paper, a seesaw torsional relay monolithically integrated in a standard 0.35 μm complementary metal oxide semiconductor (CMOS) technology is presented.
Martín Riverola +3 more
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