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Miniaturisation of Raman spectroscopy systems: from benchtop to backpocket.

open access: yesLab Chip
Hardy M   +5 more
europepmc   +1 more source
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Advanced CMOS–MEMS Resonator Platform

IEEE Electron Device Letters, 2012
Deep-submicrometer-gap CMOS-MEMS “composite” resonators fabricated using 0.18- μm-1-poly-6-metal foundry CMOS technology have been demonstrated for the first time to substantially improve their electromechanical coupling coefficient, hence leading to a motional impedance of only 880 kΩ at 15.3 MHz.
Cheng-Syun Li, Sheng-Shian Li
exaly   +2 more sources

CMOS-MEMS Filters

2008 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 2008
Silicon radio integration is currently limited by the ability to achieve high-Q filters on chip with the RF transistors. Furthermore, multi-terminal radio trends are driving the need for widely tunable filters. Progress on high-Q electrically-selectable CMOS-MEMS micromechanical filters and medium-Q widely tunable CMOS-MEMS LC filters is described ...
G. K. Fedder, T. Mukherjee
openaire   +1 more source

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