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CMOS-Compatible Micro Photovoltaic Generator with Post-Processing Enhanced Optical Absorption. [PDF]
Chen HW, Lee CY, Dai CL.
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Super-dense point clouds acquired by an ultralight 10 g solid-state single photon LiDAR. [PDF]
Ohno T +4 more
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A review of commercial and laboratory-based microfluidic devices based on glass and/or silicon substrates. [PDF]
Deb A +5 more
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Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review. [PDF]
Koh D, Jung Y, Kim J.
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Miniaturisation of Raman spectroscopy systems: from benchtop to backpocket.
Hardy M +5 more
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Advanced CMOS–MEMS Resonator Platform
IEEE Electron Device Letters, 2012Deep-submicrometer-gap CMOS-MEMS “composite” resonators fabricated using 0.18- μm-1-poly-6-metal foundry CMOS technology have been demonstrated for the first time to substantially improve their electromechanical coupling coefficient, hence leading to a motional impedance of only 880 kΩ at 15.3 MHz.
Cheng-Syun Li, Sheng-Shian Li
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2008 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 2008
Silicon radio integration is currently limited by the ability to achieve high-Q filters on chip with the RF transistors. Furthermore, multi-terminal radio trends are driving the need for widely tunable filters. Progress on high-Q electrically-selectable CMOS-MEMS micromechanical filters and medium-Q widely tunable CMOS-MEMS LC filters is described ...
G. K. Fedder, T. Mukherjee
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Silicon radio integration is currently limited by the ability to achieve high-Q filters on chip with the RF transistors. Furthermore, multi-terminal radio trends are driving the need for widely tunable filters. Progress on high-Q electrically-selectable CMOS-MEMS micromechanical filters and medium-Q widely tunable CMOS-MEMS LC filters is described ...
G. K. Fedder, T. Mukherjee
openaire +1 more source

