Materials selection and design of microelectrothermal bimaterial actuators
, 2007 A common form of MEMS actuator is a thermally actuated bimaterial, which is easy to fabricate by surface micromachining and permits out of plane actuation, which is otherwise difficult to achieve.
Prasanna, S., Spearing, S.M.
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Usage of Porous Al2O3 Layers for RH Sensing [PDF]
, 2007 At the Department of Electron Devices a cheap, more or less CMOS process compatible capacitive type RH sensor has been developed. Capacitive sensors are based on dielectric property changes of thin films upon water vapour uptake which depends on the ...
Juhász, László +3 more
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A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing. [PDF]
Sci Rep, 2021 Popa D +13 more
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Reduced 30% scanning time 3D multiplexer integrated circuit applied to large array format 20KHZ frequency inkjet print heads [PDF]
, 2007 Enhancement of the number and array density of nozzles within an inkjet head chip is one of the keys to raise the printing speed and printing resolutions.
Liou, J. -C., Tseng, F. -G.
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MicromachinesModern gas sensor technology is becoming an important part of our lives. Hence, there has been considerable effort over the past 25 years towards the goal of creating low-cost gas sensors by employing modern microelectronics technology to manufacture ...
Efraim-Lavi Bukshish +3 more
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CMOS-compatible MEMS processes and their application to the development of biosensors
, 2012 The research activity developed during my Ph.D. program was focused on CMOS-compatible MEMS (Micro-Electro-Mechanical System) processes and their application to the development of biosensors.
RUSSINO, VINCENZO
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A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology. [PDF]
Sensors (Basel), 2020 Chen CF, Shen CH, Yeh YY.
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Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS-MEMS Technique. [PDF]
Micromachines (Basel), 2020 Shen WC +4 more
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A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation. [PDF]
Sensors (Basel), 2020 Sánchez-Chiva JM +3 more
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Co-integration of Silicon Nanodevices and NEMS for Advanced Information Processing (Invited Talk)
, 2008 In this paper we present our recent attempts at developing the advanced information processing devices by integrating nano-electro-mechanical (NEM)structures into conventional silicon nanodevices.
Mizuta, Hiroshi +7 more
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