Results 171 to 180 of about 20,977 (202)

Frequency-tunable CMOS-MEMS slot antenna

Proceedings of the 2012 IEEE International Symposium on Antennas and Propagation, 2012
This paper presented a frequency-reconfigurable slot antenna fabricated in 0.18-µm CMOS process with a chip size of 1.2×1.2 mm2. By utilizing the multi-state actuators, the frequency of this antenna can be switched to 43, 47, 50.5, 54, 57.5 GHz with return loss better than 20 dB. The measured antenna patterns agree well with the simulation results.
Chun-Chi Lin, Sheng-Chi Hsieh, Chin-Yen Huang, Chia-Chan Chang   +3 more
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CMOS-MEMS resonant mixer-filters

IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest., 2006
RF mixer-filters made by micromachining composite metal and dielectric interconnect layers within foundry CMOS are a potential component in on-chip receivers. Through the electrostatic voltage-squared nonlinearity, mixer-filters down-convert to an intermodulation frequency set by the mechanical resonance enabling higher gain than resonant filters ...
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A CMOS-MEMS Thermoelectric Infrared Sensor

2010 International Conference on Electrical and Control Engineering, 2010
This paper presents a thermoelectric infrared (IR) sensor which comprise of an infrared detector and a readout circuitry. It is designed by TSMC 0.35 μm CMOS process with subsequent micromachining technology. The presented infrared sensing device can achieve the responsivity of 1277.92 V/W and time constant of 2.63 ms. The instrumentation amplifier (IA)
Hung-Yu Wang, Po-Yang Tsai, Chih-Yi Liu, Jyun-Jie Huang   +3 more
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CMOS-MEMS free-free beam resonators

2010 Proceedings of the European Solid State Device Research Conference, 2010
In this paper a 25 MHz free-free beam flexural resonator monolithically integrated in a 0.35 um CMOS technology is presented. A comparison between the frequency response and electrical characteristics between free-free beam and clamped-clamped beams shows higher qualities factor for free-free beams which will allow better oscillators for frequency ...
J.L. Lopez, E. Marigo, J. Giner, J.L. Munoz-Gamarra, F. Torres, A. Uranga, N. Barniol   +6 more
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Optimization of unreleased CMOS-MEMS RBTs

2016 IEEE International Frequency Control Symposium (IFCS), 2016
In this paper, we present an efficient framework for optimization of MEMS resonators based on model order reduction and memoization to significantly speed-up computations 40 x). Owing to their technological importance and numerous applications, unreleased CMOS resonant body transistors (RBTs) are considered.
Bichoy Bahr, Luca Daniel, Dana Weinstein
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A sub-1G CMOS-MEMS accelerometer

2015 IEEE SENSORS, 2015
We report experimental evaluation results of a CMOS (complementary-metal-oxide semiconductor)-MEMS (microelectromechanical systems) accelerometer for sensing sub-1G (1G = 9.8 m/s2) acceleration. The sub-1G MEMS sensor has been successfully implemented on a 180-nm CMOS LSI (large scale integrated circuits) for the first time.
Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida   +8 more
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Monolithic z-axis CMOS MEMS accelerometer

Microelectronic Engineering, 2014
Display Omitted We propose a monolithic z-axis CMOS MEMS accelerometer with low power consumption.The sensor is integrated with circuits in a wafer-level 0.18-µm CMOS MEMS process.The bending displacements in the microstructures can be controlled well.The use of CMOS-compatible MEMS process can reduce the cost of chip fabrication.
Sheng-Hsiang Tseng, Po-Chang Wu, Hann-Huei Tsai, Ying-Zong Juang   +3 more
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Integrated MEMS in Conventional CMOS

1998
This paper provides an overview of fabrication and design of CMOS-based microelectromechanical systems with emphasis on inertial sensor and data storage applications. High-aspect-ratio (4.4:1) microstructures can be fabricated using conventional CMOS processing followed by a sequence of maskless dry-etching steps.
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CMOS MEMS

Proceedings of 1997 IEEE International Symposium on Circuits and Systems. Circuits and Systems in the Information Age ISCAS '97, 2002
H. Baltes, A. Haberli
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NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector

Sensors and Actuators B: Chemical, 2021
Doris Ng, Yuan Hsing Fu, Tantan Zhang
exaly