Results 21 to 30 of about 20,977 (202)
Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping [PDF]
Microsystems & NanoengineeringPiezoelectric microelectromechanical systems (MEMS) mirrors enable precise and rapid beam steering with low power consumption, making them essential components in light detection and ranging (LiDAR) and advanced optical imaging systems.
Yohan Jung, Dongseok Lee, Jongbaeg Kim
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Design and Applications of Integrated Transducers in Commercial CMOS Technology
Frontiers in Mechanical Engineering, 2022 Monolithic integration of Microelectromechanical Systems (MEMS) directly within CMOS technology offers enhanced functionality for integrated circuits (IC) and the potential improvement of system-level performance for MEMS devices in close proximity to ...
Udit Rawat +2 more
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CMOS-MEMS Oscillator Architecture and Phase Noise: A Mini-Review
Frontiers in Mechanical Engineering, 2022 Over the past two decades, the advancement in microelectromechanical systems (MEMS) has been making headway in the development of miniaturized mechanical structures with integrated electronics.
Ming-Huang Li
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CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor
Micro and Nano Systems Letters, 2021 LC CMOS voltage-controlled oscillators (VCOs) with tunable inductors are essential for high-performance, multi-band communication systems, such as IoT applications and 5G communication.
Uikyu Chae +4 more
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CMOS-MEMS Vibro-Impact Devices and Applications
Frontiers in Mechanical Engineering, 2022 CMOS-MEMS-based vibro-impact devices that utilize impact-induced nonlinear dynamics have been shown to yield unique and unprecedented functionalities with on-chip integration capability.
Chun-Pu Tsai, Wei-Chang Li
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Manufacturing Issues of BEOL CMOS-MEMS Devices
IEEE Access, 2021 In this paper we present a comprehensive report on the issues found during the manufacturing of high-yield CMOS-MEMS sensors based on vapor-phase hydrogen fluoride (vapor- $HF$ ) oxide etching.
Juan Valle +3 more
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Integrated RF MEMS/CMOS devices [PDF]
2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 2008 A maskless post-processing technique for CMOS chips is developed that enables the fabrication of RF MEMS parallel-plate capacitors with a high quality factor and a very compact size. Simulations and measured results are presented for several MEMS/CMOS capacitors.
Mansour, R. R. +2 more
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Curvature of BEOL cantilevers in CMOS-MEMS processes [PDF]
, 2017 © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new ...
Barrachina, Laura +3 more
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Characterization of an embedded RF-MEMS switch [PDF]
, 2010 An RF-MEMS capacitive switch for mm-wave integrated circuits, embedded in the BEOL of 0.25μm BiCMOS process, has been characterized. First, a mechanical model based on Finite-Element-Method (FEM) was developed by taking the residual stress of the thin ...
Ehwald, K. E. +10 more
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IC-integrated flexible shear-stress sensor skin [PDF]
, 2003 This paper reports the successful development of the first IC-integrated flexible MEMS shear-stress sensor skin. The sensor skin is 1 cm wide, 2 cm long, and 70 /spl mu/m thick. It contains 16 shear-stress sensors, which are arranged in a 1-D array, with
Ho, Chih-Ming +3 more
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