Results 41 to 50 of about 20,977 (202)
On the integration of ultrananocrystalline diamond (UNCD) with CMOS chip
AIP Advances, 2017 A low temperature deposition of high quality ultrananocrystalline diamond (UNCD) film onto a finished Si-based CMOS chip was performed to investigate the compatibility of the UNCD deposition process with CMOS devices for monolithic integration of MEMS on
Hongyi Mi +8 more
doaj +1 more source
Phase Noise Reduction in a VHF MEMS-CMOS Oscillator Using Phononic Crystals
IEEE Journal of the Electron Devices Society, 2016 This paper presents experimental results showing reduced phase noise in a very high frequency band microelectromechanical systems (MEMS) oscillator. This has been achieved by engineering the embedded MEMS resonator with phononic crystal structures.
Pei Qin +3 more
doaj +1 more source
On the Trade-Off Between Quality Factor and Tuning Ratio in Tunable High-Frequency Capacitors [PDF]
, 2009 A benchmark of tunable and switchable devices at microwave frequencies is presented on the basis of physical limitations to show their potential for reconfigurable cellular applications.
Hueting, R.J.E. +4 more
core +3 more sources
A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
Sensors, 2011 This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive
Mohd Haris Md Khir, Hongwei Qu, Peng Qu
doaj +1 more source
Experiments and simulations of MEMS thermal sensors for wall shear-stress measurements in aerodynamic control applications [PDF]
, 2004 MEMS thermal shear-stress sensors exploit heat-transfer effects to measure the shear stress exerted by an air flow on its solid boundary, and have promising applications in aerodynamic control.
Han, Zhigang +7 more
core +1 more source
Characterization of CMOS-MEMS Resonant Pressure Sensors [PDF]
IEEE Sensors Journal, 2017 IEEE Comprehensive characterization results of a CMOS-MEMS resonant pressure sensor are presented. We have extensively evaluated the key performance parameters of our device in terms of quality factor (Q) variations under variable conditions of temperature and pressure, characterized by Knudsen number (Kn).
Banerji, Saoni +2 more
openaire +3 more sources
MEMS-enabled silicon photonic integrated devices and circuits [PDF]
, 2020 Photonic integrated circuits have seen a dramatic increase in complexity over the past decades. This development has been spurred by recent applications in datacenter communications and enabled by the availability of standardized mature technology ...
Bogaerts, Wim +8 more
core +1 more source
Low-Cost Microbolometer Type Infrared Detectors
Micromachines, 2020 The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications.
Le Yu +5 more
doaj +1 more source
Frontiers in Mechanical Engineering, 2022 Environmental sensing units such as gas sensors, humidity sensors, pressure sensors, PM 2.5 sensors, or temperature sensors are widely used in our daily lives. In this study, CMOS-MEMS technology is exploited to fabricate and monolithically integrate the
Ya-Chu Lee +5 more
doaj +1 more source
In Situ Study of Resistive Switching in a Nitride‐Based Memristive Device
Advanced Functional Materials, EarlyView.In situ TEM biasing experiment demonstrates the volatile I‐V characteristic of MIM lamella device. In situ STEM‐EELS Ti L2/L3 ratio maps provide direct evidence of the oxygen vacancies migrations under positive/negative electrical bias, which is critical for revealing the RS mechanism for the MIM lamella device.
Di Zhang +19 more
wiley +1 more source