Results 281 to 284 of about 1,697,138 (284)

Computational Lithography for Full Chip

openaire   +1 more source

Computational lithography with feature upsizing

2014
PARIKH ASHESH, HO CHI-CHIEN, SMELKO THOMAS JOHN   +2 more
openaire   +1 more source

Construction and optimization of a computational holographic lithography system

Wenqing Zhao
exaly  

Considerations of aberrations in high numerical aperture extreme ultraviolet lithography for computational imaging

Zhenrong Zheng, Jiayin Li, Changwei Zhang   +2 more
exaly