Results 281 to 289 of about 7,747 (289)

Efficient source mask optimization method for reduction of computational lithography cycles and enhancement of process-window predictability

Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2015
Zhiyang Song, Yayi Wei
exaly  

Computational Lithography for EUVL

openaire   +1 more source

Aspherical Lens Design Using Computational Lithography

Precision Engineering, 2017
exaly  

EUV computational lithography using accelerated topographic mask simulation

2019
Bernd Kuchler, Wolfgang Hoppe, Ulrich Klostermann   +2 more
exaly  

Computational Lithography for Full Chip

openaire   +1 more source

Advanced computational lithography based on information theory

Xu Ma
exaly  

Construction and optimization of a computational holographic lithography system

Wenqing Zhao
exaly  

Considerations of aberrations in high numerical aperture extreme ultraviolet lithography for computational imaging

Changwei Zhang, Jiayin Li, Zhenrong Zheng   +2 more
exaly  

Computational lithography to overcome the challenges in memory devices

DTCO and Computational Patterning V
openaire   +1 more source