Results 271 to 280 of about 1,697,138 (284)

Model-informed deep learning for computational lithography with partially coherent illumination

Optics Express, 2020
Gonzalo R. Arce, Xu Ma, Yihua Pan
exaly  

COMPUTED AXIAL LITHOGRAPHY OPTIMIZATION SYSTEM

2022
SHUSTEFF MAXIM, CHAMPLEY KYLE, FONG ERIKA JO, TAYLOR HAYDEN, LI CHI CHUNG, RONGEY JR TREVOR, LUK SUI MAN, FU HETING, FEILI SAMIRA, TOOMBS JOSEPH, HEIDARI HOSSEIN   +10 more
openaire   +2 more sources

LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing

Advances in Neural Information Processing Systems 36, 2023
Su Zheng, Haoyu Yang, Binwu Zhu, Bei Yu 0001, Martin D. F. Wong   +4 more
openaire   +2 more sources

Optical and EUV projection lithography: A computational view

Microelectronic Engineering, 2015
Andreas Erdmann, Tim Fühner, Dongbo Xu
exaly  

Modeling and Computational Lithography

2008
openaire   +1 more source

Aspherical Lens Design Using Computational Lithography

Precision Engineering, 2017
Yasuko Yanagida, Takeshi Hatsuzawa
exaly  

ML for Computational Lithography: Practical Recipes

Proceedings of the 30th Asia and South Pacific Design Automation Conference
openaire   +2 more sources

Review of computational lithography modeling: focusing on extending optical lithography and design-technology co-optimization

Advanced Optical Technologies, 2012
exaly  

Computational Lithography for EUVL

openaire   +1 more source

EUV computational lithography using accelerated topographic mask simulation

2019
Wolfgang Hoppe, Ling Ee Tan, Ulrich Klostermann   +2 more
exaly