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ToF–SIMS and XPS study of ion implanted 248nm deep ultraviolet (DUV) photoresist
Microelectronic Engineering, 2011Arsenic implanted 248nm DUV photoresist films were characterized by ToF-SIMS and XPS analysis methods. The effect of the implant dose and energy on the formation of the crust layer on top of the bulk photoresist was studied. The crust layer thickness was found to be dependent on the implant energy and dose. The elemental and chemical changes induced by
A. Franquet +7 more
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Laser & Photonics Reviews
ABSTRACT Designing deep ultraviolet (DUV) nonlinear optical (NLO) crystals that balance high nonlinear coefficients, moderate birefringence, and DUV transparency remains a major challenge. Here, we introduce a shape‐topology‐driven strategy to design novel layered DUV NLO materials using polar covalent tetrahedral
Chengming Hu +7 more
openaire +1 more source
ABSTRACT Designing deep ultraviolet (DUV) nonlinear optical (NLO) crystals that balance high nonlinear coefficients, moderate birefringence, and DUV transparency remains a major challenge. Here, we introduce a shape‐topology‐driven strategy to design novel layered DUV NLO materials using polar covalent tetrahedral
Chengming Hu +7 more
openaire +1 more source
Fluorescence lifetime imaging microscopy (FLIM) with deep-ultraviolet (DUV) illumination
Optical Biopsy XXIV: Toward Real-Time Spectroscopic Imaging and DiagnosisNiall Hanrahan +7 more
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Fluorooxoborates: A precious treasure of deep-ultraviolet nonlinear optical materials
Chinese Journal of Structural Chemistry, 2023Min Zhang, Xueling Hou, Ziting Yan
exaly
ARBITRARY WAVEFRONT COMPENSATOR FOR DEEP-ULTRAVIOLET (DUV) OPTICAL IMAGING SYSTEM
2019ZHANG QIANG, SEZGINER ABDURRAHMAN
openaire +2 more sources
A Review of AlGaN-Based Deep-Ultraviolet Light-Emitting Diodes on Sapphire
Applied Sciences (Switzerland), 2018Akira Hirano, Yosuke Nagasawa
exaly
Deep-Ultraviolet Raman Microspectroscopy: Characterization of Wide-Gap Semiconductors
Applied Spectroscopy, 2004Hajime Okumura
exaly

