Results 71 to 80 of about 53,870 (328)
A dicing free SOI process for MEMS devices
, 2012 This paper presents a full wafer, dicing free, dry release process for MEMS silicon-on-insulator (SOI) sensors and actuators. The developed process is particularly useful for inertial sensors that benefit from a large proof mass, for example ...
Abdolvand +25 more
core +1 more source
Real‐Time, Label‐Free Monitoring of Cell Behavior on a Bioelectronic Scaffold
Advanced Functional Materials, EarlyView.A bioelectronic nanofibrous scaffold is introduced that supports cell growth while enabling real‐time, label‐free monitoring of cellular behavior through impedance measurements. The system correlates electrical signals with cell viability and surface coverage, offering an integrated platform for studying dynamic biological processes and advancing next ...
Dana Cohen‐Gerassi +10 more
wiley +1 more source
Nano-Micro Letters, 2021 Out-of-plane microneedle structures are widely used in various applications such as transcutaneous drug delivery and neural signal recording for brain machine interface.
Hyeonhee Roh +6 more
doaj +1 more source
3D surface topography and reflectivity of anisotropic etched silicon micromirrors for BioMEMS [PDF]
, 2011 This paper examines wet and dry fabrication of vertical micro-mirrors in (110) silicon for use in an innovative BioMEMS integrating gripping and micro force sensing functionalities.
Le, HR, Lionis, N, Mackay, RE
core +2 more sources
Advanced Functional Materials, EarlyView.The negative electron affinity of diamond allows to emit highly reductive electrons. By introducing intra‐bandgap states and an optimized electron transfer mechanism by surface functionalization with Ru(bpy)3, the formation of solvated electrons is achieved upon solar irradiation.
Benjamin Kiendl +20 more
wiley +1 more source
Advanced Functional Materials, EarlyView.Ag+‐mediated hydrothermal crystal engineering promotes preferential [hk1]‐oriented growth of Sb2Se3 via an ultrathin MoOx interlayer, improving crystallinity and suppressing non‐radiative recombination. The optimized Ag+ treatment photocathode delivers 24.7 mA cm−2 at 0 VRHE and improved stability, revealing an ion‐modulated route to high‐performance ...
Ziying Zhang +10 more
wiley +1 more source
A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
Sensors, 2011 This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive
Mohd Haris Md Khir, Hongwei Qu, Peng Qu
doaj +1 more source
Recrystallized parylene as a mask for silicon chemical etching [PDF]
, 2008 This paper presents the first use of recrystallized parylene as masking material for silicon chemical etch. Recrystallized parylene was obtained by melting parylene C at 350°C for 2 hours.
Kuo, Wen-Cheng +3 more
core +2 more sources
Scalable Thermal Engineering via Femtosecond Laser‐Direct‐Written Phononic Nanostructures
Advanced Functional Materials, EarlyView.This study demonstrates that femtosecond laser‐induced periodic surface structures (fs‐LIPSS) can function as phononic metasurfaces, reducing thermal conductivity below the plain thin‐film limit. Phonon Monte Carlo analysis reveals that the periodic structures restrict phonon mean free paths.
Hiroki Hamma +4 more
wiley +1 more source
MicromachinesIn recent years, the field of micro- and nanochannel fabrication has seen significant advancements driven by the need for precision in biomedical, environmental, and industrial applications.
Koosha Karimi +5 more
doaj +1 more source