Results 61 to 70 of about 8,725 (286)
Advances in Sustainable and Wearable Textile Based Soft Robotics
This Review examines advances in wearable textile‐based soft robotics, focusing on sustainable materials, integrated sensing, and scalable actuation. It discusses manufacturing and system integration across healthcare, assistive robotics, prosthetics, and human–machine interfaces, and highlights key challenges in circular design, including life‐cycle ...
Zahir Abbas +6 more
wiley +1 more source
In recent years, the field of micro- and nanochannel fabrication has seen significant advancements driven by the need for precision in biomedical, environmental, and industrial applications.
Koosha Karimi +5 more
doaj +1 more source
Three step deep reactive ion etch for high density trench etching
A three step Deep Reactive Ion Etch (DRIE) process is developed to etch trenches of 10μm wide to a depth of 130μm into silicon with an etch rate of 2.5μm min-1. The aim of this process is to obtain sidewalls with an angle close to 90°. The process allows the etching of multiple trenches with high aspect ratios that are closely placed together.
Lips, Bram, Puers, Bob
openaire +1 more source
Hierarchical MXene‐Derived NTP/C Nanohybrids for Cryogenic Sodium‐Ion Batteries
A hierarchical MXene‐derived NaTi2(PO4)3/C nanohybrid enables efficient sodium‐ion storage down to −40°C by integrating fast ion–electron transport pathways with an ether‐based electrolyte. The system promotes dominant pseudocapacitive behavior and forms a robust inorganic‐rich SEI, collectively mitigating kinetic and interfacial limitations, thereby ...
M. Sai Bhargava Reddy +5 more
wiley +1 more source
Through via holes in fused silica are a key infrastructure element of microwave and millimeter-wave circuits and 3D integration. In this work, etching through via holes in ultra-thin fused silica wafers using deep reactive-ion etching (DRIE) and laser ...
Xiao Li, King Yuk Chan, Rodica Ramer
doaj +1 more source
A reconfigurable RRAM platform utilizing thermally pre‐formed filaments (TPFs) is developed to realize robust hardware security. By exploiting the thermodynamic stochasticity of TPFs, exceptionally reliable physically unclonable functions (PUFs) are achieved.
Seongbin Kwon +4 more
wiley +1 more source
Impedance measurements for determination of elastic and piezoelectric coefficients of films [PDF]
Most of those techniques used for the measurement of elastic coefficients for bulk piezoelectric ceramics are not applicable to films deposited on thick substrates because the measured properties, such as the resonant frequency, are usually dominated ...
Pardo, L. +5 more
core +1 more source
Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching [PDF]
We demonstrate the fabrication of diffraction-limited dielectric metasurface lenses for NIR by the use of standard industrial high-throughput silicon processing techniques: UV nano imprint lithography (UV-NIL) combined with continuous reactive ion ...
Angelskår, Hallvard +5 more
core +1 more source
Co‐delivery of electrosprayed EDOT and oxidant enables bulk oxidative polymerization during layer‐by‐layer fabrication, creating stable, highly conductive 3D PEDOT structures. This Atomized Oxidative Polymerization (AOP) overcomes the surface deposition‐only and matrix‐limited conductivity of conventional Vapor Phase Polymerization (VPP) and PEDOT:PSS ...
Tazdik Patwary Plateau +2 more
wiley +1 more source
Optimization of Etching Profile in Deep-Reactive-Ion Etching for MEMS Processes of Sensors
This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area >
Chung Mo Yang +2 more
openaire +2 more sources

