Results 71 to 80 of about 6,900 (149)

Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing. [PDF]

Microsyst Nanoeng
Wu C, Fang X, Sun H, Zhang Z, Shi M, Liu Z, Fang Z, Yan Y, Kang Q, Maeda R, Tian B, Zhao L, Jiang Z.   +12 more
europepmc   +1 more source

Atomic Layer Etching of Nickel Using N₂/H₂ Plasma Exposure and Hexafluoroacetylacetone. [PDF]

ACS Appl Electron Mater
Ali AM, Krieger G, Soulié JP, Knoops HCM, Kessels WMM, De Gendt S, Kundu S, de Marneffe JF.   +7 more
europepmc   +1 more source

SF6/CO2-based Deep Reactive Ion Etching of Si

SF6/CO2-based Deep Reactive Ion Etching of Si
identifier:oai:t2r2.star.titech.ac.jp ...
openaire  

Frequency-angle decoupling design for grid-etched piezoelectric MEMS cantilevers and its application to quasi-static micromirrors. [PDF]

Microsyst Nanoeng
Xue W, Su Y, Qiao W, Liu Y, Yang Y, Zhao H, Zhang P, Shen G, Chen H, Wang Y, Wu Z, Wang L.   +11 more
europepmc   +1 more source

Capacitive Sensors and Actuators by CMOS MEMS Foundry. [PDF]

Micromachines (Basel)
Yang LJ, Tasupalli C, Wang WC, Wang YJ, Muthuraman V, Lee CY.   +5 more
europepmc   +1 more source

Design and Development of Sc_0.2Al_0.8N-Based Dual-Piezoelectric-Layer MEMS Hydrophone. [PDF]

Micromachines (Basel)
Cui D, Duan X, Guan Z, Hu N, Guo Y, Yao Y, Yan H, Xue C.   +7 more
europepmc   +1 more source

A High-Sensitivity MEMS Piezoresistive Pressure Sensor for Intracranial Pressure Monitoring. [PDF]

Micromachines (Basel)
Yang Z, Tang Y, Tang F, Xie B, Ran X, Xie H.   +5 more
europepmc   +1 more source

Transition Metal Dichalcogenide MoS₂: Oxygen and Fluorine Functionalization for Selective Plasma Processing. [PDF]

J Phys Chem Lett
Polyachenko Y, Barsukov Y, Khalid S, Kaganovich I.   +3 more
europepmc   +1 more source

SOI-Structured Piezoresistive Pressure Sensor with Integration of Temperature Sensor for Downhole Applications. [PDF]

Sensors (Basel)
Mireles J, Jiménez A, Sauceda Á.
europepmc   +1 more source

Synthesis and advanced applications of MXene nanosheets in energy storage, EMI shielding, and biomedicine: a review. [PDF]

RSC Adv
Ghobashy MM, Baata M, Almoiqli MS, Haque MA, Algethami FK, Siddiq A, Attia MS.   +6 more
europepmc   +1 more source