Results 131 to 139 of about 1,971 (139)

Ultra Deep Reactive Ion Etching of High Aspect-Ratio and Thick Silicon Using a Ramped-Parameter Process

Journal of Microelectromechanical Systems, 2018
Yemin Tang, Amin Sandoughsaz, Khalil Najafi   +2 more
exaly  

Deep reactive ion etching

2020
Franz Laermer
exaly  

Ultrahigh Resolution Titanium Deep Reactive Ion Etching

ACS Applied Materials & Interfaces, 2017
Bryan W K Woo, Rao Masaru P
exaly  

Deep Reactive Ion Etching of Through Silicon Vias

2008
Richard Van De Sanden, Fred Roozeboom
exaly  

In-plane silicon microneedles with open capillary microfluidic networks by deep reactive ion etching and sacrificial layer based sharpening

Sensors and Actuators A: Physical, 2019
Chenxu Zhu
exaly  

Advanced deep reactive‐ion etching technology for hollow microneedles for transdermal blood sampling and drug delivery

IET Nanobiotechnology, 2013
Yufei Liu
exaly  

Deep Reactive Ion Etching

2015
Sami Franssila, Franz Laermer
exaly  

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

Sensors and Actuators A: Physical, 1996
exaly  

Deep Reactive Ion Etching

2010
exaly