Results 111 to 120 of about 2,694 (179)

Optimization of Deep Reactive Ion Etching Process for on Chip Energy Storage

, 2019
In this paper we optimize cryogenic and Bosch Deep Reactive Ion Etching (DRIE) processes to achieve the best aspect ratios of trenches that will be used for fabrication of energy storage on a chip.
Prasek, Jan, Hubalek, Jaromir, Hrdy, Radim, Houska, David, Schmid, Ulrich   +4 more
core  

Precision Fabrication of High-Speed Micro-Rotors using Deep Reactive Ion Etching (DRIE)

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 2002
N. Miki, C.J. Teo, L. Ho, X. Zhang
openaire   +1 more source

Parylene etching techniques for microfluidics and bioMEMS [PDF]

, 2005
Parylene C (poly(monochloro-p-xylylene)) is a member of a unique family of thermoplastic, crystalline polymers. Compared to other polymers, parylene films are exceptionally conformal and chemically inert owing to its vapor deposition polymerization (VDP)
Tai, Yu-Chong, Yu-chong Tai, Meng, Ellis, Ellis Meng   +3 more
core  

Design, fabrication, and characterization of a compact deep reactive ion etching system for MEMS processing

, 2014
Thesis: S.M., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2014.Cataloged from PDF version of thesis.Includes bibliographical references (pages 123-126).A general rule of thumb for new semiconductor ...
Hsing, Mitchell David, Gould, Parker Andrew   +1 more
core  

Suspended Germanium-on-Silicon Photonic Integrated Circuits Operating in the Long-Wave Infrared and Their Use for Ethanol Sensing. [PDF]

ACS Photonics
Lin PS, Hellström PE, Zervos C, Niklaus F, Gylfason KB.   +4 more
europepmc   +1 more source

Atomic Force Microscopy (AFM)-Based Metrology for Advanced Etching in Three-Dimensional Integrated Circuits. [PDF]

Micromachines (Basel)
Chang J, Wang S, Liang S, Feng X, Zhao W.   +4 more
europepmc   +1 more source

Frequency-angle decoupling design for grid-etched piezoelectric MEMS cantilevers and its application to quasi-static micromirrors. [PDF]

Microsyst Nanoeng
Xue W, Su Y, Qiao W, Liu Y, Yang Y, Zhao H, Zhang P, Shen G, Chen H, Wang Y, Wu Z, Wang L.   +11 more
europepmc   +1 more source

New Deep Reactive Ion Etching Process Developed for the Microfabrication of Silicon Carbide

, 2005
Silicon carbide (SiC) is a promising material for harsh environment sensors and electronics because it can enable such devices to withstand high temperatures and corrosive environments.
Beheim, Glenn M., Evans, Laura J.
core  

SOI-Structured Piezoresistive Pressure Sensor with Integration of Temperature Sensor for Downhole Applications. [PDF]

Sensors (Basel)
Mireles J, Jiménez A, Sauceda Á.
europepmc   +1 more source

Compact, scan-pattern-switchable 2D piezoelectric MEMS mirror with 1D addressable scanning. [PDF]

J Microelectromech Syst
Yu J, Zhu Y, Birla M, Lee M, Yang Y, Filipov E, Wang TD, Oldham KR.   +7 more
europepmc   +1 more source