Results 121 to 130 of about 2,694 (179)

Design and Implementation of Miniaturized Low-Frequency Flexibility-Enhanced Rotating Cantilever Beam Piezoelectric MEMS Microphone. [PDF]

Micromachines (Basel)
Wu B, Chen G, Zhong C, Wang T.
europepmc   +1 more source

Design and Fabrication of High-Frequency Resonant Micro-Accelerometer Based on Piezoelectric Stiffening Effect. [PDF]

Micromachines (Basel)
Todi A, Mansoorzare H, Abdolvand R.
europepmc   +1 more source

Advanced BCl₃-Driven Deep Ion Etching of β-Ga₂O₃ for Precision High-Aspect-Ratio Nanostructures. [PDF]

Sensors (Basel)
Alhalaili B.
europepmc   +1 more source

Linearity Improvement of MEMS Electrochemical Vibration Sensors Based on Tapered-Hole Technology. [PDF]

Micromachines (Basel)
Jiang H, Zhang H, Zhao W, Lu Y, Chen D, Wang J.   +5 more
europepmc   +1 more source

Post-Release Metallization in MEMS Silicon-to-Silicon Contact Switches for On-Resistance Improvement. [PDF]

Micromachines (Basel)
Shuaibu AH, Rabih AAS, Blaquière Y, Nabki F.   +3 more
europepmc   +1 more source

A capacitive-piezoelectric hybrid MEMS microphone with signal fusion for enhancing signal-to-noise ratio. [PDF]

Microsyst Nanoeng
Guan Y, Schneider M, Li D, Zhang H, Mi J, Bertrand A, Sadeghpour S, Wang C, Liu H, Glorieux C, Kraft M.   +10 more
europepmc   +1 more source

A review of glass thermal reflow: method, device, and applications. [PDF]

Microsyst Nanoeng
Zhu M, Shi P, Zhang G, Yan C, Chen F, Liu S, Lian R, Zhu K, Dai H, Wu H, Liu Y, Li B, Du X, Xue G.   +13 more
europepmc   +1 more source

Electrochemical vibration sensor for low frequency detection: model, design and manufacture. [PDF]

Microsyst Nanoeng
Zhao W, Gou G, Zhang H, Jiang H, Hu L, Zhu M, Liu Q, He X, Lu Y, Chen D, Wang J.   +10 more
europepmc   +1 more source

High-Efficiency Fiber Edge Coupling for Silicon Nitride Integrated Photonics. [PDF]

Micromachines (Basel)
Avdeev SS, Baburin AS, Sergeev EV, Kramarenko AB, Belyaev AV, Kushnev DV, Buzaverov KA, Stepanov IA, Echeistov VV, Loginov AS, Bukatin SV, Amiraslanov AS, Lotkov ES, Baklykov DA, Rodionov IA.   +14 more
europepmc   +1 more source

A review of commercial and laboratory-based microfluidic devices based on glass and/or silicon substrates. [PDF]

RSC Adv
Deb A, Nagesh G, Harrison T, Spicer D, Ting DS, Ahamed MJ.   +5 more
europepmc   +1 more source