Results 161 to 170 of about 6,778 (181)

A Novel Integrated MEMS Process Using Fluorocarbon Films Deposited With a Deep Reactive Ion Etching (DRIE) Tool

MRS Proceedings, 1999
AbstractFluorocarbon films are useful as antistiction films for suspended structure and also for electrical isolation purposes. Furthermore, due to their low dielectric constant and ease of deposition they are useful for VLSI manufacturing applications. Thus, in the interest of building a complete database for these plasma generated fluorocarbon films,
A. A. Ayón, D.-Z Chen, R. Khanna, R. Braff, H. H. Sawin, M. A. Schmidt   +5 more
openaire   +1 more source

DRIE (Deep Reactive Ion Etching)

2011
openaire   +1 more source

Deep Reactive-Ion Etching (DRIE)

2008
openaire   +1 more source

Advanced fiber optical switches using deep RIE (DRIE) fabrication

Sensors and Actuators A: Physical, 2003
Ai Qun Liu
exaly  

DRIE (Deep Reactive Ion Etching)

2008
openaire   +1 more source

A Multistep DRIE Process for Complex Terahertz Waveguide Components

IEEE Transactions on Terahertz Science and Technology, 2016
Goutam Chattopadhyay
exaly  

Deep Reactive-Ion Etching (DRIE)

2011
openaire   +1 more source

Smoothening of scalloped DRIE trench walls

Materials Science in Semiconductor Processing, 2017
Sheel Aditya
exaly  

Single-step deep reactive ion etching of ultra-deep silicon cavities with smooth sidewalls

Sensors and Actuators A: Physical, 2014
Nicolas Passilly
exaly  

Fast ultra-deep silicon cavities: Toward isotropically etched spherical silicon molds using an ICP-DRIE

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 2019
Etienne Herth, Maciej Baranski, Laurie E Calvet   +2 more
exaly