Results 171 to 179 of about 2,694 (179)

Reduction of isotropic etch for silicon nanowires created by metal assisted deep reactive ion etching

International Journal of Nanotechnology, 2018
Tung Thanh Bui, Chien Mau Dang
exaly  

Advanced deep reactive‐ion etching technology for hollow microneedles for transdermal blood sampling and drug delivery

IET Nanobiotechnology, 2013
Yufei Liu, Owen J Guy, Huma Ashraf
exaly  

Process characterisation of deep reactive ion etching for microfluidic application

International Journal of Nanotechnology, 2018
Chien Mau Dang, Dung My Thi Dang, Eric Fribourg-Blanc   +2 more
exaly  

Ultra Deep Reactive Ion Etching of High Aspect-Ratio and Thick Silicon Using a Ramped-Parameter Process

Journal of Microelectromechanical Systems, 2018
Yemin Tang, Amin Sandoughsaz, Khalil Najafi   +2 more
exaly  

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

Sensors and Actuators A: Physical, 1996
Joseph Brown, Gregory T A Kovacs
exaly  

In-plane silicon microneedles with open capillary microfluidic networks by deep reactive ion etching and sacrificial layer based sharpening

Sensors and Actuators A: Physical, 2019
Chenxu Zhu
exaly  

Deep reactive ion etching

2020
Franz Laermer
exaly  

Deep Reactive Ion Etching

2015
Franz Laermer, Sami Franssila
exaly  

Deep Reactive Ion Etching

2010
exaly