Results 171 to 180 of about 6,778 (181)

Scalloping removal on DRIE via using low concentrated alkaline solutions at low temperature

Sensors and Actuators A: Physical, 2011
Thomas Defforge, Rémi Dussart
exaly  

Ultra Deep Reactive Ion Etching of High Aspect-Ratio and Thick Silicon Using a Ramped-Parameter Process

Journal of Microelectromechanical Systems, 2018
Yemin Tang, Amin Sandoughsaz, Khalil Najafi   +2 more
exaly  

Tolerance analysis for comb-drive actuator using DRIE fabrication

Sensors and Actuators A: Physical, 2006
Ai Qun Liu
exaly  

Vertical Mirror Fabrication Combining KOH Etch and DRIE of (110) Silicon

Journal of Microelectromechanical Systems, 2009
Kyoungsik Yu, Olav Solgaard
exaly  

One-mask process for silicon accelerometers on Pyrex glass utilising notching effect in inductively coupled plasma DRIE

Electronics Letters, 2003
Ciprian Iliescu
exaly  

Silicon Micromachined W-Band Hybrid Coupler and Power Divider Using DRIE Technique

IEEE Microwave and Wireless Components Letters, 2008
exaly  

Design and Fabrication of DRIE-Patterned Complex Needlelike Silicon Structures

Journal of Microelectromechanical Systems, 2010
exaly  

Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator

Journal of Microelectromechanical Systems, 1999
exaly  

Fabrication of multilayer microstructures using dry film resist and deep reactive ion etcher

Micro and Nano Letters, 2010
exaly  

Sharp silicon tips with different aspect ratios in wet etching/DRIE and surfactant-modified TMAH etching

Sensors and Actuators A: Physical, 2012
exaly