Results 31 to 40 of about 2,694 (179)
AIP Advances, 2016 In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiNx membranes using Deep Reactive Ion Etching (DRIE).
E. Serra +18 more
doaj +1 more source
A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
Sensors, 2011 This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive
Mohd Haris Md Khir, Hongwei Qu, Peng Qu
doaj +1 more source
Proceedings, 2017 This paper presents an array of five aluminum nitride (AlN) based piezoelectric micromachined ultrasound transducers (pMUTs) with different dimensions operating at 540–2360 kHz in air.
Sina Sadeghpour +3 more
doaj +1 more source
Design, Fabrication, Testing and Simulation of a Rotary Double Comb Drives Actuated Microgripper
Micromachines, 2021 This paper presents the development of a new microgripper actuated by means of rotary-comb drives equipped with two cooperating fingers arrays. The microsystem presents eight CSFH flexures (Conjugate Surface Flexure Hinge) that allow the designer to ...
Nicola Pio Belfiore +8 more
doaj +1 more source
On-Chip Non-Dispersive Infrared CO2 Sensor Based on an Integrating Cylinder
Sensors, 2019 In this paper, we propose a novel, miniaturized non-dispersive infrared (NDIR) CO2 sensor implemented on a silicon chip. The sensor has a simple structure, consisting of a hollow metallic cylindrical cavity along with access waveguides.
Xiaoning Jia +3 more
doaj +1 more source
Advanced Functional Materials, EarlyView.A cooperative and competitive interrelationship between alcohol oxidation (AOR) and water oxidation (OER) was observed on a typical anode catalyst of Ni2P. In situ Raman spectroscopy and electrochemical analyses revealed a specific complementary mechanism between them, in which OER and AOR critically contribute to the activity and stability of anodic ...
Yong Yan +10 more
wiley +1 more source
Advanced Materials Technologies, EarlyView.Flexible silicon carbide (SiC) microelectrode arrays enable high‐fidelity, multichannel cell extracellular recording and precise localized ablation. SiC has been extensively evaluated to persist long‐term in chronic physiological conditions while remaining robust, with excellent electrical and electrochemical stability.
Minh Anh Huynh +4 more
wiley +1 more source
Frontiers in Bioengineering and Biotechnology, 2022 We report a scalable and cost-effective fabrication approach for constructing bio-inspired micro/nanostructured surfaces. It involves silicon microstructure etching using a deep reactive ion etch (DRIE) method, nanowires deposition via glancing angle ...
Lansheng Zhang +5 more
doaj +1 more source
Advanced Science, EarlyView.This study presents a miniaturized bidirectional thermal stimulation system integrated with an electrode array enabling real‐time, bidirectional modulation and simultaneous recording of neural activity through localized heating and cooling. By monolithic integration of the Peltier element and with a silicon neural probe, the innovative system allows ...
Zoia Naumkina +6 more
wiley +1 more source
, 2009 This paper presents the experimental investigation of stepped deep reactive ion etching (DRIE) process in order to minimize critical-dimension (CD) variations due to local heating observed in through-wafer etch of 100 mum-thick, high aspect ratio silicon
Akın, Tayfun +5 more
core +1 more source