Results 41 to 50 of about 11,316 (211)

3D surface topography and reflectivity of anisotropic etched silicon micromirrors for BioMEMS [PDF]

, 2011
This paper examines wet and dry fabrication of vertical micro-mirrors in (110) silicon for use in an innovative BioMEMS integrating gripping and micro force sensing functionalities.
Le, HR, Lionis, N, Mackay, RE
core   +2 more sources

Micro-Faraday cup array structures fabrication in silicon using deep reactive ion etching

International Journal of Precision Technology, 2020
Micro-Faraday cup array (MFCA) detectors are used for the detection and analysis of incident ion particles with greater stability and precision. New and simple micro FCA structures have been designed and fabricated considering the application in mass ...
J. Arab, P. Dixit, P. Brahmankar, R. Pawade, A. Srivastava   +4 more
semanticscholar   +1 more source

Electrolysis-based diaphragm actuators [PDF]

, 2006
This work presents a new electrolysis-based microelectromechanical systems (MEMS) diaphragm actuator. Electrolysis is a technique for converting electrical energy to pneumatic energy.
Andersen, R. A., Burdick, J. W., Pang, C., Tai, Y.-C.   +3 more
core   +2 more sources

Parylene etching techniques for microfluidics and bioMEMS [PDF]

, 2005
Parylene C (poly(monochloro-p-xylylene)) is a member of a unique family of thermoplastic, crystalline polymers. Compared to other polymers, parylene films are exceptionally conformal and chemically inert owing to its vapor deposition polymerization (VDP)
Meng, Ellis, Tai, Yu-Chong
core   +1 more source

Fabrication of comb-drive actuators for straining nanostructured suspended graphene

, 2018
We report on the fabrication and characterization of an optimized comb-drive actuator design for strain-dependent transport measurements on suspended graphene.
Buca, D., Driesch, N. von den, Goldsche, M., Khodkov, T., Sonntag, J., Stampfer, C., Verbiest, G. J.   +6 more
core   +1 more source

Cyclic Olefin Copolymers as Versatile Materials for Advanced Engineering Applications

Advanced Functional Materials, EarlyView.
Cyclic olefin copolymers (COCs) are presented as highly versatile materials combining tunable synthesis, excellent optical properties, and mechanical robustness. Their potential spans microfluidics, bioengineering, and advanced electronics, while emerging self‐healing and sustainable solutions highlight future opportunities.
Giulia Fredi, Norma Mallegni, Andrea Dorigato, Mario Milazzo   +3 more
wiley   +1 more source

Bio-Inspired Hierarchical Micro/Nanostructured Surfaces for Superhydrophobic and Anti-Ice Applications

Frontiers in Bioengineering and Biotechnology, 2022
We report a scalable and cost-effective fabrication approach for constructing bio-inspired micro/nanostructured surfaces. It involves silicon microstructure etching using a deep reactive ion etch (DRIE) method, nanowires deposition via glancing angle ...
Lansheng Zhang, Paul C. Uzoma, Chu Xiaoyang, Oleksiy V. Penkov, Huan Hu, Huan Hu   +5 more
doaj   +1 more source

Microfabrication of palladium-silver alloy membranes for hydrogen separation [PDF]

, 2003
In this paper, a process for the microfabrication of a wafer-scale palladium-silver alloy membrane (Pd-Ag) is presented. Pd-Ag alloy films containing 23 wt% Ag were prepared by co-sputtering from pure Pd and Ag targets.
Berenschot, Johan W., de Boer, Meint J., Elwenspoek, Michael Curt, Gardeniers, Johannes G.E., Gielens, F.C. (Frank), Jansen, Henricus V., Nijdam, A.J., Nijdam, W., Tong, D.H., van Rijn, C.J.M., Wensink, H.   +10 more
core   +2 more sources

Fabrication of High‐Density Multimodal Neural Probes Based on Heterogeneously Integrated CMOS

Advanced Science, EarlyView.
A chiplet‐based methodology democratizes active neural probe development on standard bulk CMOS services. This yields the first probe combining high‐density electrophysiology (416 electrodes) with calcium imaging (832 photodiodes) and complete on‐chip signal processing across 13 shanks.
Ju Hee Mun, Miji Kim, Wooyeon Shin, Yongjun Park, Kanghwan Kim, Il‐Joo Cho, Jae Won Shim, Min Soo Kim, Sunwoo Lee, Jeongjin Kim, Changhyuk Lee   +10 more
wiley   +1 more source

µTransparent insulating channels as components for miniaturized chemical separation Devices [PDF]

, 2000
Currently, miniaturized devices that apply electro osmotic pumping or electrophoretic separations are mostly constructed by etching small insulating channels for supply and separation on glass substrates.
Berg, A. van den, Hendrikse, J., Schasfoort, R.B.M.   +2 more
core   +2 more sources