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Dynamics of self-assembled droplet etching

Applied Physics Letters, 2009
We study the self-assembled local droplet etching of nanoholes in AlGaAs surfaces with Ga droplets. The data establish an unexpected delay of both the hole drilling process as well as the removal of the liquid material after etching. Furthermore, coarsening by Ostwald ripening is found to reduce the droplet density before drilling.
Ch. Heyn, A. Stemmann, W. Hansen
openaire   +1 more source

GaAs nanopillars by self-assembled droplet etching

Journal of Crystal Growth, 2013
Abstract GaAs nanopillars are fabricated using a combination of in situ self-organized local droplet etching of nanoholes in a semiconductor surface, nanohole filling with a different material, and ex situ material selective etching. The structural properties of the pillars are studied with atomic-force microscopy.
Ch. Heyn   +5 more
openaire   +1 more source

Mechanism and applications of local droplet etching

Journal of Crystal Growth, 2011
We give an overview on the fabrication and applications of deep nanoholes in semiconductor surfaces generated by self-assembled drilling with liquid metal droplets as etchant. The method is fully compatible with conventional molecular beam epitaxy equipment.
Ch. Heyn   +6 more
openaire   +1 more source

Molecular‐level etching by electrospray droplet impact

Surface and Interface Analysis, 2008
Abstract A novel ionization method, electrospray droplet impact (EDI), has been developed for matrix‐free SIMS. The charged water droplets used in EDI are extremely large cluster ions with masses of about a few 10 6 u.
Yuji Sakai   +3 more
openaire   +1 more source

Study on the asymmetry of nanopore in Al droplet etching

Optical and Quantum Electronics, 2021
In the local droplet etching (LDE) method, the fine split structure (FSS) of quantum dots (QDs) is directly related to the shape of the nanopores formed after annealing. The formation of highly symmetrical nanoporous is the key to the preparation of GaAs/AlGaAs QDs with small FSS.
Jiaxin Shen   +12 more
openaire   +1 more source

Droplet etching with indium – Intermixing and lattice mismatch

Journal of Crystal Growth, 2019
Abstract In contrast to Indium droplets the usage of Ga or Al droplets for the local droplet etching (LDE) technique is well established. It has been shown previously that In-droplets or In-alloys can be used for LDE with focus on small hole-depths at low etching temperatures.
M. Zocher, Ch. Heyn, W. Hansen
openaire   +1 more source

Sizing Nanoparticle-Covered Droplets by Extrusion through Track-Etch Membranes

Langmuir, 2007
Interfacial segregation of nanoparticles on droplets, such as water droplets in oil, is achieved by mixing or shaking organic solutions of the nanoparticles with water. This typically results in the formation of droplets with a large distribution of sizes, ranging from 10 microm to greater than 200 microm in diameter.
Tangirala, R   +3 more
openaire   +2 more sources

Kinetic model of local droplet etching

Physical Review B, 2011
The self-organized in situ drilling of nanoholes into semiconductor surfaces by using liquid metallic droplets during conventional molecular beam epitaxy represents a new degree of freedom for the design of heterostructure devices. A model of this local droplet etching is presented that is based on a core-shell droplet structure.
openaire   +1 more source

Origin of nanohole formation by etching based on droplet epitaxy

Nanoscale, 2014
Creating and manipulating materials at the nanoscale with controllable size, shape and nucleation site is an important task to meet the urgent demands for quantum structures with designed properties. In the last ten years, droplet epitaxy has been emerging as a versatile fabrication method for various complex nanostructures, such as quantum dots ...
Xinlei, Li   +6 more
openaire   +2 more sources

GaAs quantum dot molecules filled into droplet etched nanoholes

Journal of Crystal Growth, 2017
Abstract We fabricate self-aligned vertically stacked GaAs quantum dot molecules (QDMs) by filling of self-assembled nanoholes in AlGaAs. The tunable nanoholes are created using local droplet etching (LDE) combining conventional molecular beam epitaxy with self-assembled, lithography-free patterning. The optical emission from single, strain-free QDMs
Ch. Heyn   +5 more
openaire   +1 more source

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