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Functionalization of Droplet Etching for Quantum Rings
2018We give an overview on various types of strain-free semiconductor quantum ring (QR) structures created in a self-assembled fashion with the local droplet etching (LDE) method. LDE is fully compatible with conventional molecular beam epitaxy (MBE) and utilizes liquid Ga or Al droplets which drill nanoholes into semiconductor surfaces.
Christian Heyn +2 more
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Alloying during local droplet etching of AlGaAs surfaces with aluminium
Journal of Applied Physics, 2019Local droplet etching (LDE) drills self-assembled nanoholes into AlGaAs surfaces and represents a powerful technique for the fabrication of versatile quantum structures like quantum dots, rings, and molecules. Usually, LDE is performed at temperatures T=600−680°C if Al is used as the etching material.
M. Zocher, Ch. Heyn, W. Hansen
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Self-Assembly of Semiconductor Quantum Rings by Local Droplet Etching
Journal of Nanoelectronics and Optoelectronics, 2011We give an overview on the self-assembly and optical properties of strain-free semiconductor quantum rings (QRs) generated by the novel technique local droplet etching (LDE). LDE is fully compatible with conventional molecular beam epitaxy equipment and utilizes liquid metallic droplets which perform a spatially limited drilling and form nanovolcanoes ...
Ch. Heyn +7 more
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XPS depth profiling of polystyrene etched by electrospray droplet impact
Surface and Interface Analysis, 2010Abstract The molecular‐level depth profiling of polystyrene (PS) has been performed by using a newly designed electrospray droplet impact (EDI) gun. The multiple charged water droplets with kinetic energy of ∼10 6 eV were irradiated to a bulk and a spin‐coated PS.
Yuji Sakai +3 more
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Local droplet etching – Nanoholes, quantum dots, and air-gap heterostructures
AIP Conference Proceedings, 2014Local droplet etching (LDE) allows the self-organized generation of nanoholes in semiconductor surfaces and is fully compatible with molecular beam epitaxy (MBE). The influence of the process parameters as well as of droplet and substrate materials on the LDE nanohole morphology is discussed.
Ch. Heyn +5 more
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Nanotechnology, 2020
Symmetric droplet-etched quantum dots (QDs) are the leading candidate for generating high-performance polarization-entangled photon pairs. One of the challenges is how to precisely engineer the properties of QDs by controlling the morphology of etched nanoholes.
Xiaoying Huang +6 more
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Symmetric droplet-etched quantum dots (QDs) are the leading candidate for generating high-performance polarization-entangled photon pairs. One of the challenges is how to precisely engineer the properties of QDs by controlling the morphology of etched nanoholes.
Xiaoying Huang +6 more
openaire +2 more sources
Fabrication of superhydrophobic aluminum surface by droplet etching and chemical modification
Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2019Abstract The development of techniques to fabricate superhydrophobic aluminum surfaces is rapidly maturing, yet the problems of high loss of material and complex preparation still persist. To address this, a simple method that combines droplet etching and chemical modification was used to fabricate a superhydrophobic aluminum surface, with a contact ...
Xin Zhang +5 more
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Nanohole formation on AlGaAs surfaces by local droplet etching with gallium
Journal of Crystal Growth, 2009; A1. Atomic force microscopy ; A1. Diffusion ; A1. Low-dimensional structures ; A3. Molecular beam epitaxy ; B2. Semiconducting III-V materials We demonstrate the self-assembled generation of nanoholes on AlGaAs surfaces by local droplet etching (LDE).
Ch. Heyn, A. Stemmann, W. Hansen
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Dry etching of diamond nanowires using self-organized metal droplet masks
Diamond and Related Materials, 2011Abstract In a top–down approach diamond nanowires (DNW) were fabricated by anisotropic oxygen plasma etching of undoped or boron doped polycrystalline diamond layers. Dewetting an evaporated metal film, resulting in randomly distributed metal droplets of 5–50 nm in diameter, created the etching mask.
Janssen, Wiebke, Gheeraert, Etienne
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Droplet etched GaAs quantum dots close to surfaces and metallic interfaces
Journal of Applied Physics, 2017GaAs quantum dots (QDs) with a thin cap layer are studied as building blocks for self-aligned hybrids with a metallic nanostructure (MN). Both constituents are filled into a nanohole template that is drilled into an AlGaAs surface by self-assembled local droplet etching during molecular beam epitaxy.
Ch. Heyn +5 more
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