Results 161 to 170 of about 1,139 (207)
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Recent Progress of Soft Electrothermal Actuators
Soft Robotics, 2021Developing soft electrothermal actuators (ETAs) has drawn extensive concern in recent years. This article presents a comprehensive review on recent progress of soft ETAs through five sections: device design on structure and materials, property, fabrication methods, applications, and prospects. It's found that the fabrication process can be divided into
Ye, Tian +4 more
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A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing [PDF]
Procedia Engineering, 2014 We report on the design of a two-port ring microelectromechanical (MEMS) resonator with electrothermal actuation and piezoelectric sensing for filtering applications.
Boris Sviličić +2 more
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Widely tunable MEMS ring resonator with electrothermal actuation and piezoelectric sensing for filtering applications [PDF]
Sensors and Actuators A: Physical, 2015 In this paper, we present the design, fabrication and testing of two-port ring microelectromechanical (MEMS) resonant devices with electrothermal actuation and piezoelectric sensing for wide tunable filter applications.
Boris Sviličić +2 more
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Modeling of Beam Electrothermal Actuators
Journal of Microelectromechanical Systems, 2020Beam electrothermal actuators amplify the thermal expansion of pre-shaped beams and use the symmetrical structure to create a linear motion. These actuators, including V and Z shapes, are widely used in microsystems. Explicit analytical expressions are derived in this paper governing the structural deformation of these actuators due to electrothermal ...
Hussein Hussein +2 more
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Fabrication of an Electrothermally Actuated Electrostatic Microgripper
International Journal of Nonlinear Sciences and Numerical Simulation, 2002A novel electrostatic microgripper, which can handle micro objects with the electrostatic force, is designed and fabricated. It consists of gripping part with one inner and two outer electrodes, and releasing part with an electrothermal actuator. It grips micro objects using electric field generated between the electrodes, and releases them using the ...
Lee, S.H. +3 more
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Scaling of folded electrothermal actuators
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010Scaling of folded electrothermal actuators for optical applications in arrays from 1 mm to 50 µm pitch is presented. A 1-D model of a folded electrothermal actuator is presented to demonstrate the inverse scaling law for power with array pitch and linear scaling for rotational scan range. Metal/oxide bimorph actuators with discrete heaters are shown to
Peter J. Gilgunn, Gary K. Fedder
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Electrothermal actuator reliability studies
SPIE Proceedings, 2004Shallow V type symmetric electrothermal actuators which have a central shuttle and overall lengths of ~610 μm, leg widths between 3 and 4.5 μm, and offset angles between 0.7 and 2.3° have been subjected to short term, high stress drive currents under different environmental conditions.
Richard A. Plass +2 more
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Adjustable static and dynamic actuation of clamped-guided beams using electrothermal axial loads
Sensors and Actuators A: Physical, 2018 The paper presents adjustable static and dynamic actuations of in-plane clamped-guided beams. The structures, of variable stiffness, can be used as highly tunable resonators and actuators.
Mohammad I Younis
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Electrothermally actuated inline microfluidic valve
Sensors and Actuators A: Physical, 2003A normally open electrothermally actuated inline microvalve that has been developed, fabricated and tested with liquids is presented. These actuators use high volumetric expansion of a sealed patch of Paraffin heated above its melting point, providing large displacements and forces while using low power. The inline valve is surface micromachined on top
P Selvaganapathy +2 more
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CMOS–MEMS Lateral Electrothermal Actuators
Journal of Microelectromechanical Systems, 2008In this paper, a type of lateral electrothermal (ET) actuator fabricated with post-CMOS micromachining is presented. The actuator is a beam with a multimorph structure, composed of CMOS dielectric and metal interconnect. Following structural release, the actuators demonstrate self-assembly under the moments arising from residual stress.
P.J. Gilgunn +3 more
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