Results 171 to 180 of about 1,139 (207)
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Electrothermally actuated MEMS terahertz metamaterial
2014 International Conference on Optical MEMS and Nanophotonics, 2014We present the design, simulation, fabrication and characterization of a continuously tunable Omega-ring teratahertz metamaterial. The tunability of metamaterial is obtained by integrating electrothermal actuator where higher tuning range, larger stroke and enhanced repeatability are possible.
null ChongPei Ho +3 more
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The design and analysis of a MEMS electrothermal actuator
Journal of Semiconductors, 2015This paper introduces a type of out-of-plane microelectrothermal actuator, which is based on the principle of bimetal film thermal expansion in the fuse. A polymer SU-8 material and nickel are used as the functional and structural materials of the actuator. Through heating the resistance wire using electricity, the actuator produces out-of-plane motion
Suocheng Wang +2 more
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Repeatability study of an electrothermally actuated micromirror
2009 IEEE International Reliability Physics Symposium, 2009With their large scan range and low drive voltages, electrothermally-actuated micromirrors have great potential in optical biomedical imaging applications, but the repeatability and reliability of such micromirrors are not well understood. This paper reports the conditions for achieving repeatability of the embedded resistive heater and the mirror tilt
Sagnik Pal, Huikai Xie
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Electrothermally actuated large displacement waveguides
2013 International Conference on Optical MEMS and Nanophotonics (OMN), 2013A waveguide structure is designed and fabricated to provide a path for propagating light from device substrate to a movable mirror plate. The device is constructed with three pairs of electrothermal actuators that enable vertical motion with ultralow lateral shift.
Sean R. Samuelson, Huikai Xie
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Performance Comparison of Typical Electrothermal Actuators
Key Engineering Materials, 2013As the power producer, the micro actuator is an important part of the micro electro- mechanical system, which is used as the conversion of energy, motion and force producing. In this paper, the mechanical models of three bent beam electrothermal actuators are summarized to make comparison with each other and analyze mechanical performance. For Π-shaped
Ling Zhou +3 more
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Bi-directional electrothermal electromagnetic actuators
Journal of Micromechanics and Microengineering, 2007A new breed of in-plane bi-directional MEMS actuators based on controlled electrothermal buckling and electromagnetic Lorentz force has been demonstrated under both dc and ac operations. Experimentally, bi-directional actuators made by the standard surface-micromachining process have a lateral actuation range of several microns and can exert forces ...
Andrew Cao, Jongbaeg Kim, Liwei Lin
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A MEMS VOA Using Electrothermal Actuators
Journal of Lightwave Technology, 2007A comprehensive study of electrothermally driven microelectromechanical system (MEMS) variable optical attenuator (VOA) devices using an H-shaped structure is presented in this paper. Based on its unique structural design, a retroreflection-type VOA of smaller footprint is realized.
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Electrothermally Actuated Microbeams With Varying Stiffness
Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems, 2017We present axially loaded clamped-guided microbeams that can be used as resonators and actuators of variable stiffness, actuation, and anchor conditions. The applied axial load is implemented by U-shaped electrothermal actuators stacked at one of the beams edges.
Sherif Tella +2 more
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A bimorph electrothermal actuator for micromirror devices
SPIE Proceedings, 2015The research and development results along the characteristics of the micro-mirror element driven by thermal microactuator are presented. This work shows that for calculating micro-mirror element deflection is crucial for consideration the temperature distribution along the length of the micromirror element. The calculation of the superheat temperature
Sergey S. Evstafyev +4 more
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Compliant MicroTransmissions for Rectilinear Electrothermal Actuators
2001This paper reports on synthesized designs of compliant microstructures used to modify the force-displacement relationships of electrothermal actuators. The design process uses truss elements and involves topology synthesis and dimensional optimization in a two-stage approach.
Larry L. Chu +2 more
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