Results 191 to 200 of about 1,139 (207)
Some of the next articles are maybe not open access.
Parallel in-Plane Electrothermal Actuators
Journal of Microelectromechanical SystemsYen Nee Ho +3 more
openaire +1 more source
Corrections to “Parallel In-Plane Electrothermal Actuators”
Journal of Microelectromechanical SystemsYen Nee Ho +3 more
openaire +1 more source
CMOS-MEMS Variable Capacitors Using Electrothermal Actuation
Journal of Microelectromechanical Systems, 2010Gary K Fedder, Tamal Mukherjee
exaly
Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation
2017Haoran Wang +2 more
exaly

