Results 181 to 190 of about 1,139 (207)
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Development of X-beam electrothermal actuators
Microsystem Technologies, 2005A new electrothermal actuator with X-shaped single crystal silicon beam structure is proposed and characterized. This new actuator is made by using SOI-DRIE processes. X-beam actuator of 2000 μm projection length and 0.5° tilted angle can generate 90 μm static displacement. This new design shows a better static displacement and stability in long travel
Chengkuo Lee, J. Andrew. Yeh
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Modelling surface-micromachined electrothermal actuators
Canadian Journal of Electrical and Computer Engineering, 2004A method for the accurate simulation of electrothermal actuators is presented. The model accounts for variations in material parameters that occur over the temperature range at which polysilicon electrothermal actuators are operated. The paper then presents the steps necessary to perform a sequential electrothermal-mechanical analysis using ANSYS ...
R.W. Johnstone, M. Parameswaran
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Sub-micron metallic electrothermal actuators
Journal of Micromechanics and Microengineering, 2004The scaling down of electromechanical devices from micrometer scales to nano scales is of great interest. This paper presents fabrication and characterization of sub-micron high aspect ratio metallic electrothermal actuators using a combination of electron beam lithography and electroplating techniques.
Lee, JS +4 more
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Out-of-plane electrothermally actuated bistable buckled microbridge actuator
IEEE Sensors, 2005., 2005In this paper, we report the design, simulation, and fabrication of a novel electro-thermally actuated buckled micro-bridge for out of plane-actuation. The new structure consists of a beam supported by four springs and four 'legs' at the supporting ends.
A. Michael +3 more
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An Electrothermally Actuated MEMS Braille Dot
2019With some recent attempts on development of micro tactile displays, the realization of portable Braille is becoming more feasible. Such tactile displays can help visually impaired individuals to read and comprehend patterns by using the sense of touch. The current proposed designs for such tactile displays mainly use fluid expansion to enhance the out ...
Izhar, Umer +4 more
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Soft electrothermal actuators using silver nanowire heaters
Nanoscale, 2017Low-voltage and extremely flexible electrothermal bimorph actuators were fabricated in a simple, efficient and scalable process. The bimorph actuators were made of flexible silver nanowire (AgNW) based heaters, which exhibited a fast heating rate of 18 °C s-1 and stable heating performance with large bending.
Shanshan Yao +3 more
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Development of an all-metal electrothermal actuator and its applications
SPIE Proceedings, 2004The in-plane motion of microelectrothermal actuator (''heatuator'') has been analyzed for Si-based and metallic devices. It was found that the lateral deflection of a heatuator made of a Ni metal is about ;60% larger than that of a Si-based actuator under the same power consumption.
Luo, JiKui J. +6 more
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Electrothermal Polymer Nanocomposite Actuators
Advanced Materials, 2010Aaron T, Sellinger +3 more
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