Results 21 to 30 of about 808 (137)
3C-Silicon Carbide Microresonators for Timing and Frequency Reference
Micromachines, 2016 In the drive to miniaturise and integrate reference oscillator components, microelectromechanical systems (MEMS) resonators are excellent candidates to replace quartz crystals.
Graham S. Wood +3 more
doaj +1 more source
Micromachines, 2017 Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation.
Mengyuan Li +4 more
doaj +1 more source
Sensors, 2021 An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms
Andi Setiono +7 more
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Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO2 Bimorphs
Micromachines, 2019 Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting ...
Peng Wang +5 more
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Advanced Intelligent Systems, 2023 A new type of soft actuators based on a vertical stack of nanoporous 2,2,6,6‐tetramethylpiperidine‐1‐oxyl‐oxidized cellulose nanofibers (TOCNs) and atomically thin 2D platinum ditelluride (PtTe2) layers is reported.
Changhyeon Yoo +7 more
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A Modified U-Shaped Micro-Actuator with a Compliant Mechanism Applied to a Microgripper
Actuators, 2019 In this paper, a modified U-shaped micro-actuator with a compliant mechanism is proposed. It was analyzed with a uniform and modified thin arm, as well as a similar variation in the corresponding flexure, in order to observe the impact of the compliant ...
Pedro Vargas-Chable +4 more
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Electric characterization of a Bioinspired Gripper
Programación Matemática y Software, 2023 This work focuses on a normally open bioinspired microgripper, which corresponds to the Microelectromechanical Systems (MEMS) field, as well as on its scaling and fabrication process in aluminum 6053 for performance testing.
Alan Jesús Estrada Cabrera +3 more
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An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
Micromachines, 2019 This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs ...
Liang Zhou, Xiaoyang Zhang, Huikai Xie
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Effect of Metal Coating on Displacement of the Silicon Electrothermal V-Shaped Actuator
Machines, 2023 Electrothermal actuation is widely employed in MEMS systems, and the electrothermal V-shaped actuator (referred to as EVA) has garnered attention due to its stable output force.
Fengqi Dai +3 more
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Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim
Micromachines, 2021 A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation.
Myeong-Su Ahn +3 more
doaj +1 more source