Results 21 to 30 of about 1,139 (207)
Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement
Micromachines, 2020 Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane
Masaaki Hashimoto, Yoshihiro Taguchi
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MEMS Scanning Mirrors for Optical Coherence Tomography
Photonics, 2020 This contribution presents an overview of advances in scanning micromirrors based on MEMS (Micro-electro-mechanical systems) technologies to achieve beam scanning for OCT (Optical Coherence Tomography).
Christophe Gorecki, Sylwester Bargiel
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Large Out-of-Plane Deflection MEMS Actuators for Optical Applications
Proceedings, 2018 The design and fabrication of an electrothermal MEMS actuation structure which is capable of producing large out-of-plane deflection is presented. The actuators are used to move a 1 mm2 mirror structure, where the large deflection allows one to achieve ...
David Torres +2 more
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A miniaturized polymer-based bimorph actuator with self-sensing capability
AIP Advances, 2021 Soft actuators have recently attracted great attention in the fields of soft robots, artificial muscles, and biomimetic devices. As the size is reduced to sub-centimeter scale, most soft actuators only possess actuation capabilities without integrated ...
Huey Shy Tan +4 more
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A bi-directional electrothermal electromagnetic actuator [PDF]
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, 2004 A bi-directional microactuator powered by the combination of electrothermal and electromagnetic forces is successfully demonstrated using both the Poly-MUMPs surface micromachining process and a 50 /spl mu/m SOI process. High output force has been measured from fabricated actuators in both DC and AC operations at non-resonant frequencies.
A. Cao +3 more
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Sensors, 2021 An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms
Andi Setiono +7 more
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3C-Silicon Carbide Microresonators for Timing and Frequency Reference
Micromachines, 2016 In the drive to miniaturise and integrate reference oscillator components, microelectromechanical systems (MEMS) resonators are excellent candidates to replace quartz crystals.
Graham S. Wood +3 more
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Micromachines, 2017 Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation.
Mengyuan Li +4 more
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Advanced Intelligent Systems, 2023 A new type of soft actuators based on a vertical stack of nanoporous 2,2,6,6‐tetramethylpiperidine‐1‐oxyl‐oxidized cellulose nanofibers (TOCNs) and atomically thin 2D platinum ditelluride (PtTe2) layers is reported.
Changhyeon Yoo +7 more
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Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO2 Bimorphs
Micromachines, 2019 Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting ...
Peng Wang +5 more
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