Results 41 to 50 of about 1,139 (207)

Electrothermal Frequency Modulated Resonator for Mechanical Memory

open access: yes, 2016
In this paper, we experimentally demonstrate a mechanical memory device based on the nonlinear dynamics of an electrostatically actuated microelectromechanical resonator utilizing an electrothermal frequency modulation scheme.
Kosuru, Lakshmoji   +2 more
core   +2 more sources

Dynamic Response Analysis of an Immersed Electrothermally Actuated MEMS Mirror

open access: yesActuators, 2023
MEMS mirrors have a wide range of applications, most of which require large field-of-view (FOV). Immersing MEMS mirrors in liquid is an effective way to improve the FOV.
Tailong Liu   +4 more
doaj   +1 more source

Solid Particle‐Liquid Metal Mixtures for Robust High‐Current Interconnects in Stretchable Electronics and Soft Robotics

open access: yesAdvanced Materials Technologies, EarlyView.
Metallic microparticles dispersed in liquid metal interconnects mitigate electromigration‐induced failure by reconfiguring internal current density distributions. These fillers facilitate the growth of a robust, protective gallium oxide shell at elevated temperatures, shifting the failure threshold toward a thermal limit.
Ethan J. Krings   +6 more
wiley   +1 more source

Novel Electrothermal Microgrippers Based on a Rotary Actuator System

open access: yesMicromachines, 2022
Microgrippers are devices that have found applications in various fields of research and industry. They are driven by various actuation methods. In this article, an electrothermal rotary actuator recently proposed in the literature is explored to obtain a novel microgripper design (Model 1).
Pedro Vargas-Chable   +4 more
openaire   +3 more sources

Simultaneous Capacitive and Electrothermal Position Sensing in a Micromachined Nanopositioner [PDF]

open access: yes, 2011
This letter reports a micromachined nanopositioner with capacitive actuation together with capacitive and electrothermal sensing on a single chip. With the actuation voltage of 60 V, the electrostatic actuator can achieve a maximum displacement of 2.32 ...
M. R. Yuce   +8 more
core   +1 more source

Multimodal Actuation and Environment Adaptive Strategies of Bio‐Inspired Micro/Nanorobots in Precision Medicine

open access: yesAdvanced Robotics Research, EarlyView.
An introduction for multidrive and environment‐adaptive micro/nanorobotics: design and fabrication strategies, intelligent actuation, and their applications. Various intelligent actuation approaches—magnetic, acoustic, optical, chemical, and biological—can be synergistically designed to enhance flexibility and adaptive behavior for precision medicine ...
Aiqing Ma   +10 more
wiley   +1 more source

Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror

open access: yesSensors, 2015
In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated.
Hao Zhang   +5 more
doaj   +1 more source

Soft Actuators Integrated with Control and Power Units: Approaching Wireless Autonomous Soft Robots

open access: yesAdvanced Robotics Research, EarlyView.
Soft robots exhibit significant development potential in various applications. However, there are still key technical challenges regarding material improvement, structure design and components integration. This review focuses on the development and challenge of soft actuators, power components, and control components in untethered intelligent soft ...
Renwu Shi, Feifei Pan, Xiaobin Ji
wiley   +1 more source

Capillary Microvalve Actuation Using Thermal Expansion of Trapped Air Bubble

open access: yesProceedings, 2018
In this study, we demonstrate a compact actuation mechanism of a silicon capillary stop microvalve, based on electrothermal expansion of a trapped air bubble in a chamber.
Ujjal Barman   +3 more
doaj   +1 more source

Design, modeling and parametric analysis of Chevron shaped electrothermal actuator using low cost metalMUMPS fabrication process

open access: yes, 2020
© 2018 IEEE. High force and large displacement at the low actuation voltage is the primary concern for the micro actuators to be used for microelectromechanical systems (MEMS) based devices.
Rehman, MU   +3 more
core   +1 more source

Home - About - Disclaimer - Privacy