Results 31 to 40 of about 1,139 (207)

Electric characterization of a Bioinspired Gripper

open access: yesProgramación Matemática y Software, 2023
This work focuses on a normally open bioinspired microgripper, which corresponds to the Microelectromechanical Systems (MEMS) field, as well as on its scaling and fabrication process in aluminum 6053 for performance testing.
Alan Jesús Estrada Cabrera   +3 more
doaj   +1 more source

Effect of Metal Coating on Displacement of the Silicon Electrothermal V-Shaped Actuator

open access: yesMachines, 2023
Electrothermal actuation is widely employed in MEMS systems, and the electrothermal V-shaped actuator (referred to as EVA) has garnered attention due to its stable output force.
Fengqi Dai   +3 more
doaj   +1 more source

A Modified U-Shaped Micro-Actuator with a Compliant Mechanism Applied to a Microgripper

open access: yesActuators, 2019
In this paper, a modified U-shaped micro-actuator with a compliant mechanism is proposed. It was analyzed with a uniform and modified thin arm, as well as a similar variation in the corresponding flexure, in order to observe the impact of the compliant ...
Pedro Vargas-Chable   +4 more
doaj   +1 more source

Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim

open access: yesMicromachines, 2021
A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation.
Myeong-Su Ahn   +3 more
doaj   +1 more source

Z-Shaped Electrothermal Microgripper Based on Novel Asymmetric Actuator

open access: yesMicromachines, 2022
Based on a V-shaped microactuator with a pair of beams, modifications were made to the length and width of a microactuator to observe the effects. A theoretical approach and numerical characterization of the modified microactuator were performed.
Margarita Tecpoyotl-Torres   +4 more
doaj   +1 more source

An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability

open access: yesMicromachines, 2019
This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs ...
Liang Zhou, Xiaoyang Zhang, Huikai Xie
doaj   +1 more source

Modeling and Design Enhancement of Electrothermal Actuators for Microgripping Applications

open access: yesApplied Sciences, 2023
Microgrippers are miniature tools that have the capability to handle and manipulate micro- and nano-scale objects. The present work demonstrates the potential impact of the incorporation of perforations on a ‘hot and cold arm’ electrothermal actuation ...
Parham Dadash Pour   +2 more
doaj   +1 more source

Electrothermal Actuators with Ultrafast Response Speed and Large Deformation [PDF]

open access: yesAdvanced Intelligent Systems, 2020
The ability to fabricate electrothermal actuators (ETAs) simultaneously featuring ultrafast response speed (within 0.1 s), large deformation (bending for at least 360°), high figure‐of‐merit (FoM, larger than 0.1%), and low driving voltage (smaller than 1 V) in a single device is extremely important and challenging for their applications in artificial ...
Guinan Chen   +6 more
openaire   +2 more sources

Transducers Across Scales and Frequencies: A System‐Level Framework for Multiphysics Integration and Co‐Design

open access: yesAdvanced Materials Technologies, EarlyView.
Transducers convert physical signals into electrical and optical representations, yet each mechanism is bounded by intrinsic trade‐offs across bandwidth, sensitivity, speed, and energy. This review maps transduction mechanisms across physical scale and frequency, showing how heterogeneous integration and multiphysics co‐design transform isolated ...
Aolei Xu   +8 more
wiley   +1 more source

Tunable Extraordinary Optical Transmission in the Long‐Wavelength Infrared Range Using Electrostatic MEMS Actuation

open access: yesAdvanced Materials Technologies, EarlyView.
A MEMS‐integrated metamaterial filter enables continuous, low‐voltage spectral tuning in the long‐wavelength infrared (LWIR). The device employs extraordinary optical transmission in a dual suspended metasurface stack, where electrostatic actuation precisely controls the intermembrane air gap.
Oleg Bannik   +6 more
wiley   +1 more source

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