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Focused electron beam induced deposition: A perspective [PDF]
Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface
Michael Huth +7 more
doaj +4 more sources
Analyzing the Nanogranularity of Focused-Electron-Beam-Induced-Deposited Materials by Electron Tomography [PDF]
Nanogranular material systems are promising for a variety of applications in research and development. Their physical properties are often determined by grain sizes, shapes, mutual distances and by the chemistry of the embedding matrix With focused electron beam induced deposition arbitrarily shaped nanocomposite materials can be designed, where ...
Cornelia Trummer +4 more
core +6 more sources
Review of magnetic nanostructures grown by focused electron beam induced deposition (FEBID) [PDF]
We review the current status of the use of focused electron beam induced deposition (FEBID) for the growth of magnetic nanostructures. This technique relies on the local dissociation of a precursor gas by means of an electron beam. The most promising results have been obtained using the Co₂(CO)₈ precursor, where the Co content in the grown ...
De Teresa, J. M. +5 more
openaire +7 more sources
Motivated by the potential role of molybdenum in semiconductor materials, we present a combined theoretical and experimental gas-phase study on dissociative electron attachment (DEA) and dissociative ionization (DI) of Mo(CO)6 in comparison to focused ...
Po-Yuan Shih +6 more
doaj +2 more sources
Sidewall angle tuning in focused electron beam-induced processing [PDF]
Structures fabricated using focused electron beam-induced deposition (FEBID) have sloped sidewalls because of the very nature of the deposition process.
Sangeetha Hari +5 more
doaj +2 more sources
A Tunable Strain Sensor Using Nanogranular Metals [PDF]
This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals.
Friedemann Völklein +10 more
doaj +2 more sources
Water-assisted purification during electron beam-induced deposition of platinum and gold [PDF]
Direct fabrication of pure metallic nanostructures is one of the main aims of focused electron beam-induced deposition (FEBID). It was recently achieved for gold deposits by the co-injection of a water precursor and the gold precursor Au(tfac)Me2.
Cristiano Glessi +2 more
doaj +2 more sources
Modelling focused electron beam induced deposition beyond Langmuir adsorption [PDF]
In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes.
Dédalo Sanz-Hernández +1 more
doaj +5 more sources
In situ growth optimization in focused electron-beam induced deposition
We present the application of an evolutionary genetic algorithm for the in situ optimization of nanostructures that are prepared by focused electron-beam-induced deposition (FEBID).
Paul M. Weirich +3 more
doaj +2 more sources
Direct electron beam writing of silver using a β-diketonate precursor: first insights [PDF]
Direct electron beam writing is a powerful tool for fabricating complex nanostructures in a single step. The electron beam locally cleaves the molecules of an adsorbed gaseous precursor to form a deposit, similar to 3D printing but without the need for a
Katja Höflich +4 more
doaj +2 more sources

