New design of operational MEMS bridges for measurements of properties of FEBID-based nanostructures [PDF]
Focused electron beam-induced deposition (FEBID) is a novel technique for the development of multimaterial nanostructures. More importantly, it is applicable to the fabrication of free-standing nanostructures.
Bartosz Pruchnik +8 more
doaj +2 more sources
Shih P-Y. Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID).
Shih, Po-Yuan
openaire +3 more sources
Precursor sticking coefficient determination from indented deposits fabricated by electron beam induced deposition [PDF]
A fast simulation approach for focused electron beam induced deposition (FEBID) numerically solves the diffusion–reaction equation (continuum model) of the precursor surface on the growing nanostructure in conjunction with a Monte Carlo simulation for ...
Alexander Kuprava, Michael Huth
doaj +2 more sources
Electron-induced deposition using Fe(CO)4MA and Fe(CO)5 – effect of MA ligand and process conditions [PDF]
The electron-induced decomposition of Fe(CO)4MA (MA = methyl acrylate), which is a potential new precursor for focused electron beam-induced deposition (FEBID), was investigated by surface science experiments under UHV conditions.
Hannah Boeckers +5 more
doaj +2 more sources
Electron-induced ligand loss from iron tetracarbonyl methyl acrylate [PDF]
We probe the separation of ligands from iron tetracarbonyl methyl acrylate (Fe(CO)4(C4H6O2) or Fe(CO)4MA) induced by the interaction with free electrons.
Hlib Lyshchuk +7 more
doaj +2 more sources
Solid Ethanol as a Renewable, Low-Toxicity, Electron-Beam Direct Write, and Biomedical Material. [PDF]
3D ice lithography (3DIL) enables the fabrication of intricate submicrometer objects using ethanol as a renewable starting material. This study combines process optimization, structural and material analysis, and biomedical applications, from cell culture scaffolds to the patterning of neurostimulation electrodes, demonstrating performance in both in ...
Perdigão B +16 more
europepmc +2 more sources
Ligand Co-Deposition in Focused Electron Beam Induced Nanoprinting: A Predictive Composition Model. [PDF]
Nanoprinting using focused electron beam induced deposition (FEBID) with metalorganic molecules (ML) offers unparalleled spatial resolution and flexibility in 3D shape design. Here the key feature of nanoprint material is addressed ‐ its metal composition.
Jurczyk J +3 more
europepmc +2 more sources
Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate
High-resolution metallic nanostructures can be fabricated with multistep processes, such as electron beam lithography or ice lithography. The gas-assisted direct-write technique known as focused electron beam induced deposition (FEBID) is more versatile ...
Luisa Berger +5 more
doaj +1 more source
Background: The use of a focused ion beam to decompose a precursor gas and produce a metallic deposit is a widespread nanolithographic technique named focused ion beam induced deposition (FIBID).
Fabian Sigloch +3 more
doaj +1 more source
Developments in Nanopatterning of Graphene; Toward Direct Writing. [PDF]
Overview of principal direct‐write graphene patterning methodologies including focused electron beam induced deposition (FEBID), laser induced graphitisation (LIG), focused ion beam (FIB), scanning tunneling microscopy (STM) and atomic force microscopy (AFM) Abstract Graphene, with its exceptional electronic, mechanical, and thermal properties, remains
Abrahamczyk S +4 more
europepmc +2 more sources

