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An investigation of c-HiPIMS discharges during titanium deposition
Surface and Coatings Technology, 2014 A modified version of high power impulse magnetron sputtering (HiPIMS) has been used to deposit titanium films at higher deposition rates than for conventional HiPIMS whilst maintaining similar pulse voltages and peak currents.
Joerg Patscheider +2 more
exaly +2 more sources
Spoke behaviour in reactive HiPIMS
Plasma Sources Science and Technology, 2021Abstract Plasma in high-power impulse magnetron sputtering discharge, similarly to other discharges utilising E × B field (Hall thrusters, homopolar devices), undergoes self-organisation into the ionisation zones predominantly rotating
P Klein +4 more
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Dynamics of HiPIMS Discharge Operated in Oxygen
IEEE Transactions on Plasma Science, 2011We report on time- and species-resolved plasma imaging analysis of high-power impulse magnetron sputtering discharge operated above a Cr target in pure oxygen. It was found that the discharge emission is dominated by oxygen species. No metal-dominated sputtering has been detected, in contrast to the discharges in Ar, N2, and N2/Ar mixtures investigated
M. Hala +3 more
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Surface and Coatings Technology, 2014
Abstract High Power Impulse Magnetron Sputtering (HiPIMS) with pre-ionization was successfully used for metal deposition at very low-pressures by feeding one cathode of a conventional dual magnetron deposition system, the other one being radio frequency (RF) supplied.
Stefanos Marnieros +2 more
exaly +2 more sources
Abstract High Power Impulse Magnetron Sputtering (HiPIMS) with pre-ionization was successfully used for metal deposition at very low-pressures by feeding one cathode of a conventional dual magnetron deposition system, the other one being radio frequency (RF) supplied.
Stefanos Marnieros +2 more
exaly +2 more sources
HiPIMS deposition method unlocks higher X-ray reflectance in ultra-short-period multilayer mirrors.
Optics LettersThe efficiency of multilayer (ML) mirrors with ultra-short periods, essential for X-ray science and applications, remains severely limited by interface imperfections at sub-nanometric scale.
Corentin Nannini +6 more
semanticscholar +1 more source
Spoke transitions in HiPIMS discharges
Plasma Sources Science and Technology, 2015Spokes, localised light emission patterns appearing during the HiPIMS discharge, are investigated using optical emission diagnostic and electrical probes. Both, temporal and spatial aspects of the spoke phenomenon have been investigated. The evolution from stochastic to self-organised patterns consisting of a finite number of spokes along the racetrack
A Hecimovic +4 more
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HiPIMS ‐ Technologie und Anwendungsfelder
Vakuum in Forschung und Praxis, 2009AbstractSeit der Einführung der planaren Magnetronkatode Mitte der siebziger Jahre hat die Magnetronzerstäubung fast alle Industriezweige, für die dünne Schichten eine Rolle spielen, im Sturm erobert. Zahlreiche Meilensteine wurden in den zurückliegenden 30 Jahren gesetzt.
Ralf Bandorf +4 more
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Journal of Vacuum Science & Technology A
Diamondlike carbon (DLC) thin films have attracted growing interest due to their extraordinary properties, which occur if the fraction of sp3 C-bonds in the amorphous carbon films is high. This high fraction of sp3 C-bonds requires a high ionization rate
M. Fenker, M. Balzer, Holger Kaßner
semanticscholar +1 more source
Diamondlike carbon (DLC) thin films have attracted growing interest due to their extraordinary properties, which occur if the fraction of sp3 C-bonds in the amorphous carbon films is high. This high fraction of sp3 C-bonds requires a high ionization rate
M. Fenker, M. Balzer, Holger Kaßner
semanticscholar +1 more source