Results 121 to 130 of about 11,414 (169)

System modeling of MEMS Gyroscopes

2007 Mediterranean Conference on Control & Automation, 2007
This paper presents a systematic approach to obtain governing equations of Micro Electro Mechanical Gyroscopes. The focus will be on vibratory type and its mechanical parameters, involved in modeling and designing, will be discussed due to their deep impact on overall performance of Gyroscopes.
Ramyar Rashed, H. Momeni
openaire   +1 more source

Frequency-Modulated MEMS Gyroscopes: A Review

IEEE Sensors Journal, 2021
As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based on MEMS craft has attracted more and more attention in recent years, owing to its advantages in low power consumption, low temperature sensitivity, very high bandwidth, and excellent scale factor stability.
Xingjing Ren, Xin Zhou, Sheng Yu, Xuezhong Wu, Dingbang Xiao   +4 more
openaire   +1 more source

100 kHz MEMS Vibratory Gyroscope

Journal of Microelectromechanical Systems, 2013
The behavior of MEMS rate gyroscopes depends on the sensor's resonance frequency f0. Key features like robustness against external vibrations and ease of integration can be optimized by increasing f0. We designed and fabricated a device with f0=100 kHz for experimental and theoretical investigation of MEMS vibratory gyroscopes with increased f0.
Jan-Timo Liewald, Burkhard Kuhlmann, Thorsten Balslink, Martin Trachtler, Matthias Dienger, Yiannos Manoli   +5 more
openaire   +1 more source

High Performance MEMS Thermal Gyroscope

Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B, 2012
This paper reports modeling a new design of Thermal MEMS gyroscope through the use of the Comsol Multiphysics software package. Being very small and having no movable parts have made thermal MEMS gyroscope very practical. Previously designed Thermal MEMS gyroscope shows some limitation such as being vulnerable to gravity force.
Nilgoon Zarei, Albert M. Leung, John D. Jones   +2 more
openaire   +1 more source

A DRIE CMOS-MEMS gyroscope

Proceedings of IEEE Sensors, 2003
The gyroscope reported in this paper is a lateral-axis angular rate sensor with in-plane vibration and out-of-plane Coriolis acceleration sensing. The sensor plus on-chip CMOS circuitry is about 1 mm by 1 mm in size and is fabricated by a post-CMOS micromachining process that uses interconnect metal layers as etching mask(s) and a single-crystal ...
null Huikai Xie, G.K. Fedder
openaire   +1 more source

MEMS TECHNOLOGIES FOR NOVEL GYROSCOPES

2023
Gyroscopes have become an integral part of many application spaces ranging from consumer electronics to navigation. As navigation and movement tracking becomes necessary through inertial measurement units (that comprises gyroscopes and accelerometers) in myriad of scenarios especially when global navigation and satellite system (GNSS) is not available,
openaire   +1 more source

Active disturbance rejection control for MEMS gyroscopes

2008 American Control Conference, 2008
A new control method is presented to drive the drive axis of a MEMS gyroscope to resonance and regulate the output amplitude of the axis to a fixed level. It is based on a unique active disturbance rejection control (ADRC) strategy, which actively estimates and compensates for internal dynamic changes of the plant and external disturbances in real time.
null Qing Zheng, null Lili Dong, null Dae Hui Lee, null Zhiqiang Gao   +3 more
openaire   +1 more source

Adaptive controller design of MEMS gyroscopes

ITSC 2001. 2001 IEEE Intelligent Transportation Systems. Proceedings (Cat. No.01TH8585), 2002
An angular rate-sensing scheme for z-axis MEMS oscillatory gyroscopes, which is based on observer-based adaptive control, is presented. The proposed observer based adaptive control scheme estimates the component of the angular velocity vector (z-axis), which is orthogonal to the plane of oscillation of the gyroscope, as well as compensates friction ...
null Sungsu Park, R. Horowitz, null Chin-Woo Tan   +2 more
openaire   +1 more source

Study on MEMS tunneling effect gyroscope

2009 IEEE International Symposium on Industrial Electronics, 2009
A new structure of tunneling gyroscope which is high-accuracy and low-range was presented in this paper, as well as the structure and the operating principles of this gyroscope were analyzed. Besides, the simulations were made in this paper which is close to the principle. Then the structure was fabricated by MEMS technological processes.
null Shi Yunbo, null Zhang Qiong, null Li Junhong, null Tong Xiaogang, null Ma Zongmin, null Liu Jun   +5 more
openaire   +1 more source

MEMS Gyroscopes’ Noise Simulation Algorithm

2019
MEMS gyroscopes are advantageous devices that promote a wide range of applications, however, they suffer from various stochastic errors some of which accumulate over time (angle random walk, bias random walk). To be able to use such devices, one should apply mathematical models of stochastic processes and hardware-software tools for investigation into ...
Dmytro Fedasyuk, Tetyana Marusenkova
openaire   +1 more source