Results 171 to 180 of about 174,012 (205)
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Vertical mems gyroscope by horizontal driving
The Journal of the Acoustical Society of America, 2006A vertical MEMS gyroscope by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and having a portion fixed to an upper surface of the support layer and another portion in parallel with the fixed portion, the driving structure having a ...
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Acoustically Isolated MEMS Baw Gyroscopes
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023Diego Emilio Serrano +7 more
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A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Nanoscale Research Letters, 2021Abdullah S Algamili +2 more
exaly
Fast-response MEMS xylene gas sensor based on CuO/WO3 hierarchical structure
Journal of Hazardous Materials, 2022Xiaohong Wang, Jiaqiang Xu
exaly
Yaw/Heading optimization by drift elimination on MEMS gyroscope
Sensors and Actuators A: Physical, 2021Minh Long Hoang, A. Pietrosanto
semanticscholar +1 more source
A Silicon MEMS Quatrefoil Suspension Gyroscope
Journal of Microelectromechanical Systems, 2023Madan Parajuli +2 more
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Patient adherence and persistence with oral anticancer treatment
Ca-A Cancer Journal for Clinicians, 2009Kathryn J Ruddy, Ann H Partridge
exaly